An ultrahigh vacuum-compatible scanning tunneling microscope head mounted on a 2 3/4 in. outer diameter flange
Journal Article
·
· Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena; (United States)
- Frie Univ. Berlin (Germany)
This paper describes a simplified ultra-high-vacuum scanning-tunneling-microscope (UHV-STM). The UHV-STM can be mounted through a 35-mm i.d. flange in arbitrary spatial orientation. It is thermally well-compensated and highly insensitive to vibrations. The scanner provides atomic resolution capability as well as a large scan range of 7x7 {mu}m. The UHV-STM is driven by unmodified Nanoscope 2 electronics. Samples as well as tips are exchangeable via an airlock system. Topographic images of the 7x7 reconstruction on Si(111) and of micron-size Au islands on Si(111) are shown.
- OSTI ID:
- 5221513
- Journal Information:
- Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena; (United States), Vol. 9:2; ISSN 0734-211X
- Country of Publication:
- United States
- Language:
- English
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