Magnetic properties and thermal stability of Fe-Zr-N/Si-N and Fe-Ta-N/Si-N multilayer film (abstract)

Journal Article · Fri Nov 15 00:00:00 EST 1991 · Journal of Applied Physics; (United States)

DOI:https://doi.org/10.1063/1.349963· OSTI ID:5191658

Hoshi, Y ^[1]; Naoe, M ^[2]

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1. Tokyo Institute of Polytechnics, Atsugi-shi, Kanagawaken 243-02 (Japan)
2. Tokyo Institute of Technology, Meguro-ku, Tokyo 152 (Japan)

It has been shown that Fe-N/Si-N multilayer films has excellent soft magnetic properties, but their properties are deteriorated easily by increasing the temperature above 400 {degree}C.{sup 1} In this study, we added a small amount of Zr and Ta to the Fe-N layer to improve their thermal stability of the soft magnetic properties. Multilayer films about 3000 A thick were deposited by an opposed target sputtering apparatus on glass slide substrates. Thickness of the Si-N layer was fixed at 50 A, while those of the Fe-Zr-N (or Fe-Ta-N) layer {ital T}{sub Fe-N} was changed in the range from 200 to 1000 A. For control of the film composition, a composite target was used. The area ratio of the Zr (or Ta) plate to total target area was changed in the range 0{similar to}4.8%. Figure 1 shows the changes in coercivity {ital H}{sub {ital c}} and saturation magnetization {ital M}{sub {ital s}} of the Fe-Zr-N/Si-N film with annealing temperature. The changes in x-ray diffraction patterns of these films are shown in Fig. 2. It is evident from these figures that the crystal growth in the films obtained by the sputtering of 4.8%: Zr-Fe target is significantly suppressed, though the film obtained by the sputtering of 3.2%: Zr is crystallized at a temperature below 400 {degree}C. Soft magnetic properties of the 4.8%: Zr film are not deteriorated by the annealing at the temperature up to 550 {degree}C. Saturation magnetization has a tendency to increase as the annealing temperature increases. Similar results are obtained in the addition of Ta.

• OSTI ID: 5191658
• Journal Information: Journal of Applied Physics; (United States), Vol. 70:10; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
IRON NITRIDES
COERCIVE FORCE
MAGNETIZATION
SILICON NITRIDES
TANTALUM NITRIDES
ZIRCONIUM NITRIDES
ANNEALING
HEAT TREATMENTS
IRON COMPOUNDS
NITRIDES
NITROGEN COMPOUNDS
PNICTIDES
REFRACTORY METAL COMPOUNDS
SILICON COMPOUNDS
TANTALUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
ZIRCONIUM COMPOUNDS
360204* - Ceramics
Cermets
& Refractories- Physical Properties