Energy spectrum of an abnormal glow discharge created electron beam
Abnormal glow discharge created electron beams, applied to microelectronic film processing, have been studied theoretically and experimentally. The beam mode of operation occurs in the discharge region adjacent to the glow to arc transition regime. A numerical model simulates the energy distribution I(E) of transmitted beam electrons both inside and outside the cathode sheath. Changes in the I(E) spectrum are calculated as a function of distance in the field-free region outside the sheath. In the theoretical model of beam generation and propagation we include secondary electrons created at the cathode following ion bombardment, the electron energy gain that occurs in the field of the cathode sheath, elastic electron-atom collisions, electron-atom ionization collisions, electron-atom excitation collisions, superelastic electron-atom collisions, and electron-electron collisions. The calculated I(E) spectrum agrees with experimentally measured data at a total ambient pressure of 0.2-0.9 torr in a helium-oxygen mixture with a cathode current density in the range of 10-100 mA/cm/sup 2/.
- Research Organization:
- Dept. of Electrical Engineering, Colorado State Univ., Fort Collins, CO 80523
- OSTI ID:
- 5146670
- Journal Information:
- IEEE Trans. Plasma Sci.; (United States), Vol. PS-14:4
- Country of Publication:
- United States
- Language:
- English
Similar Records
Glow-discharge-created electron beams: Cathode materials, electron gun designs, and technological applications
THE THEORY OF GAS DISCHARGES WITH EXTRANEOUS ION SUPPLY
Related Subjects
GENERAL PHYSICS
42 ENGINEERING
ELECTRON BEAMS
ENERGY SPECTRA
GLOW DISCHARGES
BEAM PRODUCTION
BEAM TRANSPORT
CATHODES
CURRENT DENSITY
DISTANCE
ELECTRON-ATOM COLLISIONS
ELECTRON-ELECTRON COLLISIONS
FILMS
GAIN
HELIUM
ION BEAMS
MATHEMATICAL MODELS
MEDIUM PRESSURE
MICROELECTRONICS
MIXTURES
OXYGEN
SECONDARY BEAMS
AMPLIFICATION
ATOM COLLISIONS
BEAMS
COLLISIONS
DISPERSIONS
ELECTRIC DISCHARGES
ELECTRODES
ELECTRON COLLISIONS
ELEMENTS
FLUIDS
GASES
LEPTON BEAMS
NONMETALS
PARTICLE BEAMS
RARE GASES
SPECTRA
640301* - Atomic
Molecular & Chemical Physics- Beams & their Reactions
420800 - Engineering- Electronic Circuits & Devices- (-1989)