Axial magnetic field extraction-type microwave ion source with a permanent magnet

Journal Article · Sun Apr 01 00:00:00 EST 1984 · Rev. Sci. Instrum.; (United States)

DOI:https://doi.org/10.1063/1.1137795· OSTI ID:5115109

Ishikawa, J; Takeiri, Y; Takagi, T

We have developed a new type of microwave ion source which has an axial magnetic field generated by a permanent magnet. By the combination of the permanent magnet and ferromagnetic materials, a closed magnetic circuit is formed through an ion extraction electrode. This axial magnetic field is utilized both for the high-density plasma production by the electron- cyclotron resonance process and for the high efficient ion extraction by transporting the generated ions along the magnetic force lines. The continuous ion beams of 2--3 mA are delivered from the extraction aperture (2 mm in diameter) when various gases (Ar, N/sub 2/, CO/sub 2/), metal vapors (Cs, Rb), and reactive gas (O/sub 2/) are used. Extremely low impurities are present in the extracted ion beam. An ion beam with low emittance of 10/sup -8/ m rad order and high brightness of 10/sup 11/ A m/sup -2/ rad/sup -2/ order is obtained. The size of this ion source is 50 mm in diameter and 65 mm in height. The discharge power of the microwave with the frequency of 2.45 GHz is 7 to 30 W. Thus, a high-current microwave ion source with compact structure and low power consumption is realized.

• Research Organization: Department of Electronics, Kyoto University, Kyoto 606, Japan
• OSTI ID: 5115109
• Journal Information: Rev. Sci. Instrum.; (United States), Vol. 55:4
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
43 PARTICLE ACCELERATORS
ION SOURCES
ELECTRON CYCLOTRON-RESONANCE
FABRICATION
MAGNETS
MICROWAVE EQUIPMENT
PLASMA PRODUCTION
ACCELERATORS
APERTURES
ARGON
CARBON DIOXIDE
DESIGN
ECR HEATING
EFFICIENCY
ELECTRIC CURRENTS
ELECTRIC DISCHARGES
ELECTRODES
ELECTRON DENSITY
ETCHING
IMPURITIES
ION BEAMS
MAGNETIC FIELDS
MICROWAVE TUBES
NITROGEN
OPERATION
OXYGEN
PLASMA DENSITY
POWER
SPUTTERING
BEAMS
CARBON COMPOUNDS
CARBON OXIDES
CHALCOGENIDES
CURRENTS
CYCLOTRON RESONANCE
ELECTRON TUBES
ELECTRONIC EQUIPMENT
ELEMENTS
EQUIPMENT
FLUIDS
GASES
HEATING
HIGH-FREQUENCY HEATING
NONMETALS
OPENINGS
OXIDES
OXYGEN COMPOUNDS
PLASMA HEATING
RARE GASES
RESONANCE
SURFACE FINISHING
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