Investigation on the low pressure limit of the Bayard--Alpert gauge

Journal Article · Mon Sep 01 00:00:00 EDT 1986 · J. Vac. Sci. Technol., A; (United States)

DOI:https://doi.org/10.1116/1.574063· OSTI ID:5032219

Chou, T S; Tang, Z Q

To extend the pressure measurement capability of a Bayard--Alpert (BA) gauge, several commercial BA gauges are modified. To study the position dependence of filament on gauge sensitivity, hair-pin filaments instead of commercial helical filaments were used. The characteristics of the modified gauge, which included the variation of the gauge sensitivity on the applied voltage and the position of the filament, are reported. To monitor the normal and the reverse x-ray photocurrents, the gauge was inserted into a fixed size tube of 304 LN stainless steel. The validity of the self-modulation was confirmed. A sensitivity of 60 Torr/sup -1/ and an x-ray limit of 2.7 x 10/sup -13/ Torr (N/sub 2/ equivalent) was obtained.

• Research Organization: Brookhaven National Laboratory, Upton, New York 11973
• OSTI ID: 5032219
• Journal Information: J. Vac. Sci. Technol., A; (United States), Vol. 4:5
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
BAYARD-ALPERT GAGES
SENSITIVITY
NITROGEN
PHOTOCURRENTS
PRESSURE MEASUREMENT
CURRENTS
ELECTRIC CURRENTS
ELEMENTS
IONIZATION GAGES
MEASURING INSTRUMENTS
NONMETALS
PRESSURE GAGES
VACUUM GAGES
420700* - Engineering- Vacuum Engineering- (-1987)