Development of NbN Josephson Junction technology. Final report, 14 September 1985-15 June 1986

Technical Report · Thu Jul 24 00:00:00 EDT 1986

OSTI ID:5025888

Radparvar, M

A novel process suitable for fabricating superconducting circuitry based on the all-refactory material NbN is described. In this process, and in-situ trilayer film composed of NbN/MgO/NbN is used to fabricate Josephson tunnel junctions. Reactive ion-etching processes are used to delineate devices and pattern insulators and metallizations. Fabricated junctions yielded good tunneling characteristics with reasonable current-density uniformity and reproducibility. Devices with gap voltages close to 3mV were achieved for high-quality junctions (Vm > 20 mV). In addition to the trilayer, there are two wiring layers, two resistor depositions, and two insulation layers, constituting a full NbN-based fabrication technology. Using this process, the author fabricated and successfully tested thin-film DC SQUID and time-domain reflectometer (TDR) circuits. Preliminary measurements suggest that the critical temperature of these circuits is well within the operating temperature of commercial two-stage closed-cycle refrigerators.

• Research Organization: Hypress, Inc., Elmsford, NY (USA)
• OSTI ID: 5025888
• Report Number(s): AD-A-171067/2/XAB
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
36 MATERIALS SCIENCE
JOSEPHSON JUNCTIONS
FABRICATION
NIOBIUM NITRIDES
SQUID DEVICES
CRYOGENICS
DIRECT CURRENT
MAGNESIUM OXIDES
SUPERCONDUCTORS
ALKALINE EARTH METAL COMPOUNDS
CHALCOGENIDES
CURRENTS
ELECTRIC CURRENTS
ELECTRONIC EQUIPMENT
EQUIPMENT
FLUXMETERS
JUNCTIONS
MAGNESIUM COMPOUNDS
MEASURING INSTRUMENTS
MICROWAVE EQUIPMENT
NIOBIUM COMPOUNDS
NITRIDES
NITROGEN COMPOUNDS
OXIDES
OXYGEN COMPOUNDS
PNICTIDES
REFRACTORY METAL COMPOUNDS
SUPERCONDUCTING DEVICES
SUPERCONDUCTING JUNCTIONS
TRANSITION ELEMENT COMPOUNDS
420201* - Engineering- Cryogenic Equipment & Devices
360204 - Ceramics
Cermets
& Refractories- Physical Properties