A cryogenic xenon droplet generator for use in a compact laser plasma x-ray source
- Oak Ridge National Laboratory (ORNL), P.O. Box 2009, Oak Ridge, Tennessee 37831-8071 (United States)
A research instrument has been designed, fabricated, and tested that produces {approximately}25{endash}100{mu}m diameter, liquid xenon droplets on demand at variable repetition rates of 1{endash}100 Hz. Drops have been produced with low spatial dispersion which allows consistent interception by a high power laser beam to produce x-rays for advanced lithography systems. Experimental sequences of up to 42 min in length have been conducted at 30 Hz, producing over 75000 xenon drops. This technology allows significant debris reduction from the laser-target interaction. The mass-limited, cryogenic droplets are vaporized, producing no fragments, and the resulting gas can be collected preferentially on a cold surface for later recycling. {copyright} {ital 1997 American Institute of Physics.}
- Research Organization:
- Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
- DOE Contract Number:
- AC05-96OR22464
- OSTI ID:
- 496914
- Journal Information:
- Review of Scientific Instruments, Vol. 68, Issue 5; Other Information: PBD: May 1997
- Country of Publication:
- United States
- Language:
- English
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