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Title: Polycapillary x-ray optics for thin film strain and texture analysis

Conference ·
OSTI ID:305498
; ; ;  [1]; ;  [2]
  1. Univ. of Albany, NY (United States). Center for X-Ray Optics
  2. X-ray Optical Systems Inc., Albany, NY (United States)

Polycapillary optics, shaped arrays consisting of hundreds of thousands of hollow glass capillary tubes, can be used to redirect, collimate, or focus x-ray beams from conventional, laboratory-based sources. Multifiber polycapillary collimating optics were placed without system optimization into a number of diffractometer systems. Strain and texture measurements were performed. Measurements on thin films with and without the lens yielded gains of 8--100. Gains are higher in comparison with systems employing pinhole rather than one-dimensional slit collimation. The collimation also resulted in peak symmetrization, which simplified peak shape analysis. Focused beam optics provide even larger gains. Gains of 100 have been demonstrated using polycapillary optics with spot sizes as small as 20 {micro}m. This is of particular significance for providing spatial resolution for low signal applications such as thin films. The inverse dependence of the critical angle for total external reflection on photon energy also results in suppression of high energy photons. This suppression of Bremsstrahlung can allow use of higher tube potentials to increase characteristic line emission. Background suppression from a polycapillary optic soller slit is also enhanced due to the two dimensional collimation and much smaller acceptance angle of the polycapillary optics. Polycapillary optic alignment is also faster and more convenient than the usual parafocusing geometry. The combination of background suppression, intensity gain and increased tube emission by employing polycapillary optics greatly increases the signal to noise ratio for thin film stress analysis.

OSTI ID:
305498
Report Number(s):
CONF-971201-; TRN: 99:002834
Resource Relation:
Conference: 1997 fall meeting of the Materials Research Society, Boston, MA (United States), 1-5 Dec 1997; Other Information: PBD: 1998; Related Information: Is Part Of Thin-films -- Stresses and mechanical properties 7; Cammarata, R.C. [ed.] [Naval Research Lab., Washington, DC (United States)]; Nastasi, M. [ed.] [Los Alamos National Lab., NM (United States)]; Busso, E.P. [ed.] [Univ. of London (United Kingdom). Imperial Coll.]; Oliver, W.C. [ed.] [Nano Instruments, Inc., Oak Ridge, TN (United States)]; PB: 663 p.; Materials Research Society symposium proceedings, Volume 505
Country of Publication:
United States
Language:
English