Direct-Write Ion Beam Lithography

Joshi-Imre, Alexandra; Bauerdick, Sven

doi:10.1155/2014/170415

Title: Direct-Write Ion Beam Lithography

Journal Article · Wed Jan 01 00:00:00 EST 2014 · Journal of Nanotechnology

DOI:https://doi.org/10.1155/2014/170415· OSTI ID:2280417

^[1];

^[2]

Independent, Richardson, TX 75081, USA
Raith GmbH, Konrad-Adenauer-Allee 8, Phoenix West, 44263 Dortmund, Germany

Patterning with a focused ion beam (FIB) is an extremely versatile fabrication process that can be used to create microscale and nanoscale designs on the surface of practically any solid sample material. Based on the type of ion-sample interaction utilized, FIB-based manufacturing can be both subtractive and additive, even in the same processing step. Indeed, the capability of easily creating three-dimensional patterns and shaping objects by milling and deposition is probably the most recognized feature of ion beam lithography (IBL) and micromachining. However, there exist several other techniques, such as ion implantation- and ion damage-based patterning and surface functionalization types of processes that have emerged as valuable additions to the nanofabrication toolkit and that are less widely known. While fabrication throughput, in general, is arguably low due to the serial nature of the direct-writing process, speed is not necessarily a problem in these IBL applications that work with small ion doses. Here we provide a comprehensive review of ion beam lithography in general and a practical guide to the individual IBL techniques developed to date. Special attention is given to applications in nanofabrication.

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Sponsoring Organization:: USDOE

OSTI ID:: 2280417

Journal Information:: Journal of Nanotechnology, Journal Name: Journal of Nanotechnology Vol. 2014; ISSN 1687-9503

Publisher:: Hindawi Publishing CorporationCopyright Statement

Country of Publication:: United Kingdom

Language:: English

References (151)

Sculpturing of photonic crystals by ion beam lithography: towards complete photonic bandgap at visible wavelengths Juodkazis, Saulius; Rosa, Lorenzo; Bauerdick, Sven Optics Express, Vol. 19, Issue 7 https://doi.org/10.1364/OE.19.005802	journal	January 2011
Focused ion beam (FIB) milling of electrically insulating specimens using simultaneous primary electron and ion beam irradiation Stokes, D. J.; Vystavel, T.; Morrissey, F. Journal of Physics D: Applied Physics, Vol. 40, Issue 3 https://doi.org/10.1088/0022-3727/40/3/028	journal	January 2007
Gas-assisted focused electron beam and ion beam processing and fabrication Utke, Ivo; Hoffmann, Patrik; Melngailis, John Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 26, Issue 4 https://doi.org/10.1116/1.2955728	journal	January 2008
Femtosecond laser near field ablation Plech, A.; Leiderer, P.; Boneberg, J. Laser & Photonics Reviews, Vol. 3, Issue 5 https://doi.org/10.1002/lpor.200810044	journal	August 2009
Focused chromium ion beam Steele, A. V.; Knuffman, B.; McClelland, J. J. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 28, Issue 6 https://doi.org/10.1116/1.3502668	journal	October 2010
A low magnification focused ion beam system with 8 nm spot size Kubena, R. L.; Ward, J. W.; Stratton, F. P. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, Vol. 9, Issue 6 https://doi.org/10.1116/1.585373	journal	November 1991
Performance enhancement of semiconductor devices by control of discrete dopant distribution Hori, M.; Shinada, T.; Taira, K. Nanotechnology, Vol. 20, Issue 36 https://doi.org/10.1088/0957-4484/20/36/365205	journal	August 2009
Maskless fabrication of JFETs via focused ion beams De Marco, Anthony J.; Melngailis, John Solid-State Electronics, Vol. 48, Issue 10-11 https://doi.org/10.1016/j.sse.2004.05.022	journal	October 2004
Focused ion beam scan routine, dwell time and dose optimizations for submicrometre period planar photonic crystal components and stamps in silicon Hopman, Wico C. L.; Ay, Feridun; Hu, Wenbin Nanotechnology, Vol. 18, Issue 19 https://doi.org/10.1088/0957-4484/18/19/195305	journal	April 2007
Fabrication of magnetic dot arrays by ion beam induced chemical vapor deposition (IBICVD) Lapicki, A.; Kang, K.; Suzuki, T. IEEE Transactions on Magnetics, Vol. 38, Issue 5 https://doi.org/10.1109/TMAG.2002.803224	journal	September 2002
Focused Ion beam implantation of diamond McKenzie, W. R.; Quadir, Md. Z.; Gass, M. H. Diamond and Related Materials, Vol. 20, Issue 8 https://doi.org/10.1016/j.diamond.2011.06.022	journal	August 2011
Subsurface damage from helium ions as a function of dose, beam energy, and dose rate Livengood, Richard; Tan, Shida; Greenzweig, Yuval Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 27, Issue 6 https://doi.org/10.1116/1.3237101	journal	January 2009
Tailoring the optical constants of diamond by ion implantation Draganski, M. A.; Finkman, E.; Gibson, B. C. Optical Materials Express, Vol. 2, Issue 5 https://doi.org/10.1364/OME.2.000644	journal	April 2012
Drawing graphene nanoribbons on SiC by ion implantation Tongay, S.; Lemaitre, M.; Fridmann, J. Applied Physics Letters, Vol. 100, Issue 7 https://doi.org/10.1063/1.3682479	journal	February 2012
Focused ion-beam implantation induced thermal quantum-well intermixing for monolithic optoelectronic device integration Reithmaier, J. P. IEEE Journal of Selected Topics in Quantum Electronics, Vol. 4, Issue 4 https://doi.org/10.1109/2944.720469	journal	January 1998
Focused ion beam fabrication of one-dimensional photonic crystals on Si₃N₄/SiO₂channel waveguides Cabrini, S.; Businaro, L.; Prasciolu, M. Journal of Optics A: Pure and Applied Optics, Vol. 8, Issue 7 https://doi.org/10.1088/1464-4258/8/7/S39	journal	June 2006
Nanofabrication of doped, complex oxides Waller, Gordon H.; Stein, Aaron; Abiade, Jeremiah T. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 30, Issue 1 https://doi.org/10.1116/1.3669645	journal	January 2012
Scanning-helium-ion-beam lithography with hydrogen silsesquioxane resist Winston, D.; Cord, B. M.; Ming, B. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 27, Issue 6 https://doi.org/10.1116/1.3250204	journal	January 2009
Ion implantation in diamond using 30keV Ga+ focused ion beam Rubanov, Sergey; Suvorova, Alexandra Diamond and Related Materials, Vol. 20, Issue 8 https://doi.org/10.1016/j.diamond.2011.06.027	journal	August 2011
Ion-Beam-Assisted Lift-Off Technique for Three-Dimensional Micromachining of Freestanding Single-Crystal Diamond Olivero, P.; Rubanov, S.; Reichart, P. Advanced Materials, Vol. 17, Issue 20 https://doi.org/10.1002/adma.200500752	journal	October 2005
Focused ion beam implantation for opto- and microelectronic devices König, H.; Mais, N.; Höfling, E. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, Vol. 16, Issue 4 https://doi.org/10.1116/1.590210	journal	July 1998
Writing FIB implantation and subsequent anisotropic wet chemical etching for fabrication of 3D structures in silicon Schmidt, B.; Bischoff, L.; Teichert, J. Sensors and Actuators A: Physical, Vol. 61, Issue 1-3, p. 369-373 https://doi.org/10.1016/S0924-4247(97)80291-9	journal	June 1997
SRIM – The stopping and range of ions in matter (2010) Ziegler, James F.; Ziegler, M. D.; Biersack, J. P. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 268, Issue 11-12 https://doi.org/10.1016/j.nimb.2010.02.091	journal	June 2010
Gold nanoparticle arrays on graphite surfaces Prével, B.; Bardotti, L.; Fanget, S. Applied Surface Science, Vol. 226, Issue 1-3 https://doi.org/10.1016/j.apsusc.2003.11.018	journal	March 2004
Ion beam nanopatterning in graphite: characterization of single extended defects Mélinon, P.; Hannour, A.; Bardotti, L. Nanotechnology, Vol. 19, Issue 23 https://doi.org/10.1088/0957-4484/19/23/235305	journal	May 2008
Focused ion beams in microfabrication Seliger, R. L.; Fleming, W. P. Journal of Applied Physics, Vol. 45, Issue 3 https://doi.org/10.1063/1.1663422	journal	March 1974
Focused ion beams for microfabrication Daniel, J. H.; Walker, J. F.; Moore, D. F. Engineering Science & Education Journal, Vol. 7, Issue 2 https://doi.org/10.1049/esej:19980201	journal	April 1998
High-resolution focused ion beam lithography Matsui, Shinji; Kojima, Yoshikatsu; Ochiai, Yukinori Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, Vol. 9, Issue 5 https://doi.org/10.1116/1.585660	journal	September 1991
Focused ion beam as tool for atomic force microscope (AFM) probes sculpturing Menozzi, C.; Calabri, L.; Facci, P. Journal of Physics: Conference Series, Vol. 126 https://doi.org/10.1088/1742-6596/126/1/012070	journal	August 2008
In-Plane Epitaxial Growth of Self-Assembled Ge Nanowires on Si Substrates Patterned by a Focused Ion Beam Marcus, I. Carmen; Berbezier, Isabelle; Ronda, Antoine Crystal Growth & Design, Vol. 11, Issue 7 https://doi.org/10.1021/cg200433r	journal	June 2011
Rapid and three-dimensional nanoimprint template fabrication technology using focused ion beam lithography Taniguchi, Jun; Koga, Kentaro; Kogo, Yasuo Microelectronic Engineering, Vol. 83, Issue 4-9 https://doi.org/10.1016/j.mee.2006.01.101	journal	April 2006
New characterization method of ion current-density profile based on damage distribution of Ga+ focused-ion beam implantation in GaAs Assayag, G. Ben; Vieu, C.; Gierak, J. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, Vol. 11, Issue 6 https://doi.org/10.1116/1.586998	journal	November 1993
Functional Perovskites - From Epitaxial Films to Nanostructured Arrays Vrejoiu, Ionela; Alexe, Marin; Hesse, Dietrich Advanced Functional Materials, Vol. 18, Issue 24 https://doi.org/10.1002/adfm.200800560	journal	December 2008
Microfabrication techniques using focused ion beams and emergent applications Vasile, M. J.; Nassar, R.; Xie, J. Micron, Vol. 30, Issue 3 https://doi.org/10.1016/S0968-4328(99)00008-6	journal	June 1999
Fundamental limits to imaging resolution for focused ion beams Orloff, Jon Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 14, Issue 6 https://doi.org/10.1116/1.588663	journal	November 1996
Single‐crystal diamond plate liftoff achieved by ion implantation and subsequent annealing Parikh, N. R.; Hunn, J. D.; McGucken, E. Applied Physics Letters, Vol. 61, Issue 26 https://doi.org/10.1063/1.107981	journal	December 1992
Single dopants in semiconductors Koenraad, Paul M.; Flatté, Michael E. Nature Materials, Vol. 10, Issue 2 https://doi.org/10.1038/nmat2940	journal	January 2011
Integrated Ultramicroelectrode−Nanopipet Probe for Concurrent Scanning Electrochemical Microscopy and Scanning Ion Conductance Microscopy Comstock, David J.; Elam, Jeffrey W.; Pellin, Michael J. Analytical Chemistry, Vol. 82, Issue 4 https://doi.org/10.1021/ac902224q	journal	January 2010
Overcoming material challenges for replication of “motheye lenses” using step and flash imprint lithography for optoelectronic applications Kettle, J.; Hoyle, R. T.; Perks, R. M. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, Vol. 26, Issue 5 https://doi.org/10.1116/1.2981081	journal	September 2008
Focused-ion-beam-based rapid prototyping of nanoscale magnetic devices Khizroev, S.; Litvinov, D. Nanotechnology, Vol. 15, Issue 3 https://doi.org/10.1088/0957-4484/15/3/R01	journal	December 2003
2D arrays of CoPt nanocluster assemblies Hannour, A.; Bardotti, L.; Prével, B. Surface Science, Vol. 594, Issue 1-3 https://doi.org/10.1016/j.susc.2005.07.002	journal	December 2005
Focused Ion Beam Micromachining of GaN Photonic Devices Chyr, Irving; Steckl, A. J. MRS Proceedings, Vol. 537 https://doi.org/10.1557/PROC-537-G10.7	journal	January 1998
Damage threshold for ion‐beam induced graphitization of diamond Uzan‐Saguy, C.; Cytermann, C.; Brener, R. Applied Physics Letters, Vol. 67, Issue 9 https://doi.org/10.1063/1.115004	journal	August 1995
Rapid Prototyping of Nanostructured Materials with a Focused Ion Beam Wilhelmi, Oliver; Reyntjens, Steve; Mitterbauer, Christoph Japanese Journal of Applied Physics, Vol. 47, Issue 6S https://doi.org/10.1143/JJAP.47.5010	journal	June 2008
Recent Developments in Nanofabrication Using Focused Ion Beams Tseng, Ampere A. Small, Vol. 1, Issue 10 https://doi.org/10.1002/smll.200500113	journal	October 2005
An improved gallium liquid metal ion source geometry for nanotechnology Vanes, J. Microelectronic Engineering, Vol. 73-74 https://doi.org/10.1016/j.mee.2004.02.029	journal	June 2004
Exploration of the ultimate patterning potential achievable with high resolution focused ion beams Gierak, J.; Mailly, D.; Hawkes, P. Applied Physics A, Vol. 80, Issue 1, p. 187-194 https://doi.org/10.1007/s00339-004-2551-z	journal	January 2005
Ion beam induced chemical vapor deposition (IBICVD) of cobalt particles Łapicki, Adam; Ahmad, Ehsan; Suzuki, Takao Journal of Magnetism and Magnetic Materials, Vol. 240, Issue 1-3 https://doi.org/10.1016/S0304-8853(01)00725-9	journal	February 2002
Fabrication of cone-shaped boron doped diamond and gold nanoelectrodes for AFM–SECM Avdic, A.; Lugstein, A.; Wu, M. Nanotechnology, Vol. 22, Issue 14 https://doi.org/10.1088/0957-4484/22/14/145306	journal	March 2011
3D-Tailored Gold Nanoparticles for Light Field Enhancement and Harvesting over Visible-IR Spectral Range Rosa, Lorenzo; Sun, Kai; Mizeikis, Vygantas The Journal of Physical Chemistry C, Vol. 115, Issue 13 https://doi.org/10.1021/jp109099m	journal	March 2011
Integrated lasers in crystalline double tungstates with focused-ion-beam nanostructured photonic cavities Ay, F.; Iñurrategui, I.; Geskus, D. Laser Physics Letters, Vol. 8, Issue 6 https://doi.org/10.1002/lapl.201110013	journal	April 2011
Single-Molecule Studies of Intrinsically Disordered Proteins Using Solid-State Nanopores Japrung, Deanpen; Dogan, Jakob; Freedman, Kevin J. Analytical Chemistry, Vol. 85, Issue 4 https://doi.org/10.1021/ac3035025	journal	January 2013
Focused ion-beam fabrication of fiber probes with well-defined apertures for use in near-field scanning optical microscopy Pilevar, Saeed; Edinger, Klaus; Atia, Walid Applied Physics Letters, Vol. 72, Issue 24 https://doi.org/10.1063/1.121570	journal	June 1998
Sub-5nm FIB direct patterning of nanodevices Gierak, J.; Madouri, A.; Biance, A. L. Microelectronic Engineering, Vol. 84, Issue 5-8 https://doi.org/10.1016/j.mee.2007.01.059	journal	May 2007
Materials modifications using a multi-ion beam processing and lithography system Appleton, Bill R.; Tongay, S.; Lemaitre, M. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 272 https://doi.org/10.1016/j.nimb.2011.01.054	journal	February 2012
Focused ion beam-shaped microtools for ultra-precision machining of cylindrical components Picard, Y. N.; Adams, D. P.; Vasile, M. J. Precision Engineering, Vol. 27, Issue 1, p. 59-69 https://doi.org/10.1016/S0141-6359(02)00188-5	journal	January 2003
Focused ion beam technology and applications Melngailis, John Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 5, Issue 2 https://doi.org/10.1116/1.583937	journal	March 1987
Neon Ion Beam Lithography (NIBL) Winston, Donald; Manfrinato, Vitor R.; Nicaise, Samuel M. Nano Letters, Vol. 11, Issue 10 https://doi.org/10.1021/nl202447n	journal	October 2011
Controlled fabrication of nanopit patterns on a graphite surface using focused ion beams and oxidation Ghaleh, F.; Köster, R.; Hövel, H. Journal of Applied Physics, Vol. 101, Issue 4 https://doi.org/10.1063/1.2450677	journal	February 2007
Single-Ion Implantation for the Development of Si-Based MOSFET Devices with Quantum Functionalities McCallum, Jeffrey C.; Jamieson, David N.; Yang, Changyi Advances in Materials Science and Engineering, Vol. 2012 https://doi.org/10.1155/2012/272694	journal	January 2012
Solid-state nanopore technologies for nanopore-based DNA analysis Healy, Ken; Schiedt, Birgitta; Morrison, Alan P. Nanomedicine, Vol. 2, Issue 6 https://doi.org/10.2217/17435889.2.6.875	journal	December 2007
Focused Ion Beam Milled CoPt Magnetic Force Microscopy Tips for High Resolution Domain Images Gao, L.; Yue, L. P.; Yokota, T. IEEE Transactions on Magnetics, Vol. 40, Issue 4 https://doi.org/10.1109/TMAG.2004.829173	journal	July 2004
Dry-etching development characteristics of Se75Ge25 resist for focused-ion-beam lithography Lee, Hyun-Young; Chung, Hong-Bay Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, Vol. 16, Issue 4 https://doi.org/10.1116/1.590118	journal	July 1998
Magnetic patterning by means of ion irradiation and implantation Fassbender, J.; McCord, J. Journal of Magnetism and Magnetic Materials, Vol. 320, Issue 3-4 https://doi.org/10.1016/j.jmmm.2007.07.032	journal	February 2008
Focused Ion Beam Nanofabrication: A Comparison with Conventional Processing Techniques Langford, R. M. Journal of Nanoscience and Nanotechnology, Vol. 6, Issue 3 https://doi.org/10.1166/jnn.2006.111	journal	March 2006
Design and focused ion beam fabrication of single crystal diamond nanobeam cavities Babinec, Thomas M.; Choy, Jennifer T.; Smith, Kirsten J. M. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 29, Issue 1 https://doi.org/10.1116/1.3520638	journal	January 2011
Resolution, masking capability and throughput for direct-write, ion implant mask patterning of diamond surfaces using ion beam lithography Tripathi, Sarvesh K.; Scanlan, Declan; O'Hara, Neal Journal of Micromechanics and Microengineering, Vol. 22, Issue 5 https://doi.org/10.1088/0960-1317/22/5/055005	journal	March 2012
Low-temperature, site selective graphitization of SiC via ion implantation and pulsed laser annealing Lemaitre, Maxime G.; Tongay, Sefaattin; Wang, Xiaotie Applied Physics Letters, Vol. 100, Issue 19 https://doi.org/10.1063/1.4707383	journal	May 2012
Low-energy ion-implantation-induced quantum-well intermixing Aimez, V.; Beauvais, J.; Beerens, J. IEEE Journal of Selected Topics in Quantum Electronics, Vol. 8, Issue 4 https://doi.org/10.1109/JSTQE.2002.800846	journal	July 2002
Three-dimensional microfluidic mixers using ion beam lithography and micromachining Palacios, E.; Ocola, L. E.; Joshi-Imre, A. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 28, Issue 6, p. C6I1-C6I6 https://doi.org/10.1116/1.3505128	journal	November 2010
Review of focused ion beam implantation mixing for the fabrication of GaAs-based optoelectronic devices Steckl, A. J.; Chen, P.; Jackson, H. E. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, Vol. 13, Issue 6 https://doi.org/10.1116/1.588396	journal	November 1995
Application of vector scanning in focused ion beam photomask repair system Yasaka, Anto; Aramaki, Fumio; Muramatsu, Masashi Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, Vol. 26, Issue 6 https://doi.org/10.1116/1.2976574	journal	November 2008
Ga⁺ beam lithography for nanoscale silicon reactive ion etching Henry, M. D.; Shearn, M. J.; Chhim, B. Nanotechnology, Vol. 21, Issue 24, Article No. 245303 https://doi.org/10.1088/0957-4484/21/24/245303	journal	May 2010
Fabrication of two-dimensional electron systems by focused ion beam doping of III/V semiconductor heterostructures Meier, Cedrik; Reuter, Dirk; Riedesel, Christof Journal of Applied Physics, Vol. 93, Issue 10 https://doi.org/10.1063/1.1563032	journal	May 2003
Scanning probe tip geometry optimized for metrology by focused ion beam ion milling Vasile, M. J. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 9, Issue 6 https://doi.org/10.1116/1.585846	journal	November 1991
Large area direct-write focused ion-beam lithography with a dual-beam microscope Imre, Alexandra; Ocola, Leonidas E.; Rich, Lauren Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 28, Issue 2 https://doi.org/10.1116/1.3308974	journal	March 2010
Plasmonic Materials Murray, W. A.; Barnes, W. L. Advanced Materials, Vol. 19, Issue 22 https://doi.org/10.1002/adma.200700678	journal	November 2007
Focused ion beam-based fabrication of nanostructured photonic devices Cryan, M. J.; Hill, M.; Sanz, D. C. IEEE Journal of Selected Topics in Quantum Electronics, Vol. 11, Issue 6 https://doi.org/10.1109/JSTQE.2005.860990	journal	November 2005
Production of noble gas ion beams in a focused ion beam machine using an electron beam ion trap Ullmann, Falk; Grossmann, Frank; Ovsyannikov, Vladimir P. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, Vol. 25, Issue 6 https://doi.org/10.1116/1.2799971	journal	November 2007
Fabrication of visibly photoluminescent Si microstructures by focused ion beam implantation and wet etching Xu, J.; Steckl, A. J. Applied Physics Letters, Vol. 65, Issue 16 https://doi.org/10.1063/1.112799	journal	October 1994
Alloy liquid metal ion source for carbon focused ion beams Mazarov, P.; Wieck, A. D.; Bischoff, L. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, Vol. 27, Issue 6 https://doi.org/10.1116/1.3253471	journal	November 2009
Direct laser writing of three-dimensional photonic-crystal templates for telecommunications Deubel, Markus; von Freymann, Georg; Wegener, Martin Nature Materials, Vol. 3, Issue 7 https://doi.org/10.1038/nmat1155	journal	June 2004
High-resolution focused ion beams Orloff, Jon Review of Scientific Instruments, Vol. 64, Issue 5 https://doi.org/10.1063/1.1144104	journal	May 1993
Solid-state nanopores Dekker, Cees Nature Nanotechnology, Vol. 2, Issue 4 https://doi.org/10.1038/nnano.2007.27	journal	March 2007
A Review on Mixing in Microfluidics Suh, Yong Kweon; Kang, Sangmo Micromachines, Vol. 1, Issue 3 https://doi.org/10.3390/mi1030082	journal	September 2010
The fabrication of silicon nanostructures by local gallium implantation and cryogenic deep reactive ion etching Chekurov, N.; Grigoras, K.; Peltonen, A. Nanotechnology, Vol. 20, Issue 6, Article No. 065307 https://doi.org/10.1088/0957-4484/20/6/065307	journal	January 2009
Combined helium ion beam and nanoimprint lithography attains 4 nm half-pitch dense patterns Li, Wen-Di; Wu, Wei; Stanley Williams, Richard Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 30, Issue 6 https://doi.org/10.1116/1.4758768	journal	November 2012
Surface plasmon subwavelength optics Barnes, William L.; Dereux, Alain; Ebbesen, Thomas W. Nature, Vol. 424, Issue 6950, p. 824-830 https://doi.org/10.1038/nature01937	journal	August 2003
Ion beam lithography for Fresnel zone plates in X-ray microscopy Keskinbora, Kahraman; Grévent, Corinne; Bechtel, Michael Optics Express, Vol. 21, Issue 10 https://doi.org/10.1364/OE.21.011747	journal	January 2013
Nanopore-Based Devices for Bioanalytical Applications Mulero, Rafael; Prabhu, Anmiv S.; Freedman, Kevin J. Journal of the Association for Laboratory Automation, Vol. 15, Issue 3 https://doi.org/10.1016/j.jala.2010.01.009	journal	June 2010
Focused-ion-beam-induced deposition of superconducting nanowires Sadki, E. S.; Ooi, S.; Hirata, K. Applied Physics Letters, Vol. 85, Issue 25 https://doi.org/10.1063/1.1842367	journal	December 2004
Ultra‐smooth single crystal diamond surfaces resulting from implantation and lift‐off processes Thi, T. N. Tran; Fernandez, B.; Eon, D. physica status solidi (a), Vol. 208, Issue 9 https://doi.org/10.1002/pssa.201100038	journal	August 2011
Microfabrication of microlens array by focused ion beam technology Fu, Yong-Qi; Kok, Ngoi; Bryan, Ann Microelectronic Engineering, Vol. 54, Issue 3-4 https://doi.org/10.1016/S0167-9317(00)00416-0	journal	December 2000
Focused-ion-beam nanostructuring of Al₂O₃dielectric layers for photonic applications Ay, Feridun; Wörhoff, Kerstin; de Ridder, René M. Journal of Micromechanics and Microengineering, Vol. 22, Issue 10 https://doi.org/10.1088/0960-1317/22/10/105008	journal	August 2012
A novel focused-ion-beam lithography process for sub-100 nanometer technology nodes Arshak, Khalil; Mihov, Miroslav; Nakahara, Shohei Superlattices and Microstructures, Vol. 36, Issue 1-3 https://doi.org/10.1016/j.spmi.2004.08.030	journal	July 2004
Ga + focused-ion-beam exposure and CF4 reactive-ion-etching development of Si3N4 resist optimized by Monte Carlo simulation Lee, Hyun-Yong; Chung, Hong-Bay Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, Vol. 16, Issue 3 https://doi.org/10.1116/1.590086	journal	May 1998
Matching effect and dynamic phases of vortex matter in Bi2Sr2CaCu2O8 nanoribbon with a periodic array of holes Avci, S.; Xiao, Z. L.; Hua, J. Applied Physics Letters, Vol. 97, Issue 4 https://doi.org/10.1063/1.3473783	journal	July 2010
Focused-Ion-Beam Fabrication of Slanted Grating Couplers in Silicon-on-Insulator Waveguides Schrauwen, Jonathan; Van Laere, Frederik; Van Thourhout, Dries IEEE Photonics Technology Letters, Vol. 19, Issue 11 https://doi.org/10.1109/LPT.2007.897293	journal	June 2007
Ion-beam-induced chemical-vapor deposition of FePt and CoPt particles Xu, Q. Y.; Kageyama, Y.; Suzuki, T. Journal of Applied Physics, Vol. 97, Issue 10 https://doi.org/10.1063/1.1851875	journal	May 2005
Enhanced Raman scattering from focused surface plasmons Bahns, J. T.; Imre, A.; Vlasko-Vlasov, V. K. Applied Physics Letters, Vol. 91, Issue 8 https://doi.org/10.1063/1.2759985	journal	August 2007
Focused Ion Beam Nanopatterning for Optoelectronic Device Fabrication Kim, Y. K.; Danner, A. J.; Raftery, J. J. IEEE Journal of Selected Topics in Quantum Electronics, Vol. 11, Issue 6 https://doi.org/10.1109/JSTQE.2005.859022	journal	January 2005
Magnetic interactions in dot arrays with perpendicular anisotropy Repain, V.; Jamet, J. -P.; Vernier, N. Journal of Applied Physics, Vol. 95, Issue 5 https://doi.org/10.1063/1.1645973	journal	February 2004
Use of focused-ion-beam and modeling to optimize submicron MOSFET characteristics IEEE Transactions on Electron Devices, Vol. 45, Issue 2 https://doi.org/10.1109/16.658680	journal	January 1998
Physics of perpendicular magnetic recording: writing process Khizroev, S.; Liu, Y.; Mountfield, K. Journal of Magnetism and Magnetic Materials, Vol. 246, Issue 1-2 https://doi.org/10.1016/S0304-8853(01)00855-1	journal	April 2002
Functional Probes for Scanning Probe Microscopy Akiyama, K.; Eguchi, T.; An, T. Journal of Physics: Conference Series, Vol. 61 https://doi.org/10.1088/1742-6596/61/1/005	journal	March 2007
Mass filtered plasma focused ion beam system Otis, Charles E.; Graupera, Anthony; Laur, Dustin Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 30, Issue 6 https://doi.org/10.1116/1.4764920	journal	November 2012
A review of the optical properties of alloys and intermetallics for plasmonics Blaber, M. G.; Arnold, M. D.; Ford, M. J. Journal of Physics: Condensed Matter, Vol. 22, Issue 14 https://doi.org/10.1088/0953-8984/22/14/143201	journal	March 2010
Sub-10-nm nanolithography with a scanning helium beam Sidorkin, Vadim; van Veldhoven, Emile; van der Drift, Emile Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 27, Issue 4 https://doi.org/10.1116/1.3182742	journal	January 2009
High resolution and high density ion beam lithography employing HSQ resist Bruchhaus, L.; Bauerdick, S.; Peto, L. Microelectronic Engineering, Vol. 97 https://doi.org/10.1016/j.mee.2012.04.033	journal	September 2012
Optical improvement of photonic devices fabricated by Ga+ focused ion beam micromachining Tao, Hai-Hua; Ren, Cheng; Feng, Shuai Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, Vol. 25, Issue 5 https://doi.org/10.1116/1.2770741	journal	August 2007
Exploration of the ultimate patterning potential achievable with focused ion beams Gierak, J.; Bourhis, E.; Faini, G. Ultramicroscopy, Vol. 109, Issue 5 https://doi.org/10.1016/j.ultramic.2008.09.007	journal	April 2009
Atom diffusion and impurity-induced layer disordering in quantum well III-V semiconductor heterostructures Deppe, D. G.; Holonyak, N. Journal of Applied Physics, Vol. 64, Issue 12 https://doi.org/10.1063/1.341981	journal	December 1988
Probe modification for scanning-probe microscopy by the focused ion beam method Konoplev, B. G.; Ageev, O. A.; Smirnov, V. A. Russian Microelectronics, Vol. 41, Issue 1 https://doi.org/10.1134/S1063739712010052	journal	January 2012
Using laser-cooled atoms as a focused ion beam source Hanssen, J. L.; Dakin, E. A.; McClelland, J. J. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, Vol. 24, Issue 6 https://doi.org/10.1116/1.2363406	journal	November 2006
Anisotropy of the critical temperature of a superconducting niobium thin film with an array of nanoscale holes in an external magnetic field Latimer, M. L.; Xiao, Z. L.; Hua, J. Physical Review B, Vol. 87, Issue 2 https://doi.org/10.1103/PhysRevB.87.020507	journal	January 2013
Scanning probe lithography tips with spring-on-tip designs: Analysis, fabrication, and testing Wang, Xuefeng; Vincent, Loren; Bullen, David Applied Physics Letters, Vol. 87, Issue 5 https://doi.org/10.1063/1.2006210	journal	July 2005
Patterning and characterization of 2D photonic crystals fabricated by focused ion beam etching of multilayer membranes Paraire, N. A.; Filloux, P. G.; Wang, K. Nanotechnology, Vol. 15, Issue 3 https://doi.org/10.1088/0957-4484/15/3/019	journal	December 2003
Three-dimensional direct laser writing inspired by stimulated-emission-depletion microscopy [Invited] Fischer, Joachim; Wegener, Martin Optical Materials Express, Vol. 1, Issue 4 https://doi.org/10.1364/OME.1.000614	journal	January 2011
A review of focused ion beam applications in microsystem technology Reyntjens, Steve; Puers, Robert Journal of Micromechanics and Microengineering, Vol. 11, Issue 4 https://doi.org/10.1088/0960-1317/11/4/301	journal	July 2001
Focused ion beam technology and ultimate applications Gierak, Jacques Semiconductor Science and Technology, Vol. 24, Issue 4 https://doi.org/10.1088/0268-1242/24/4/043001	journal	March 2009
Focused Ion Beam Micro- and Nanoengineering Langford, Richard M.; Nellen, Philipp M.; Gierak, Jacques MRS Bulletin, Vol. 32, Issue 5 https://doi.org/10.1557/mrs2007.65	journal	May 2007
Three-Dimensional Microstructural Characterization Using Focused Ion Beam Tomography Uchic, Michael D.; Holzer, Lorenz; Inkson, Beverley J. MRS Bulletin, Vol. 32, Issue 5 https://doi.org/10.1557/mrs2007.64	journal	May 2007
TEM Sample Preparation and FIB-Induced Damage Mayer, Joachim; Giannuzzi, Lucille A.; Kamino, Takeo MRS Bulletin, Vol. 32, Issue 5 https://doi.org/10.1557/mrs2007.63	journal	May 2007
Focused Ion Beam Microscopy and Micromachining Volkert, C. A.; Minor, A. M. MRS Bulletin, Vol. 32, Issue 5 https://doi.org/10.1557/mrs2007.62	journal	May 2007
Microfluidic Mixing: A Review Lee, Chia-Yen; Chang, Chin-Lung; Wang, Yao-Nan International Journal of Molecular Sciences, Vol. 12, Issue 5 https://doi.org/10.3390/ijms12053263	journal	May 2011
A new write head trimmed at wafer level by focused ion beam Koshikawa, T.; Nagai, A.; Yokoyama, Y. IEEE Transactions on Magnetics, Vol. 34, Issue 4 https://doi.org/10.1109/20.706586	journal	July 1998
Bridging the length scales between lithographic patterning and self assembly mechanisms in fabrication of semiconductor nanostructure arrays Hull, R.; Floro, J. A.; Gherasimova, M. Journal of Physics: Conference Series, Vol. 209 https://doi.org/10.1088/1742-6596/209/1/012003	journal	February 2010
Physical Techniques for Chip-Backside IC Debug in Nanotechnologies Boit, Christian; Schlangen, Rudolf; Kerst, Uwe IEEE Design & Test of Computers, Vol. 25, Issue 3 https://doi.org/10.1109/MDT.2008.82	journal	May 2008
Diamond integrated quantum photonics Greentree, Andrew D.; Fairchild, Barbara A.; Hossain, Faruque M. Materials Today, Vol. 11, Issue 9 https://doi.org/10.1016/S1369-7021(08)70176-7	journal	September 2008
Enhancing semiconductor device performance using ordered dopant arrays Shinada, Takahiro; Okamoto, Shintaro; Kobayashi, Takahiro Nature, Vol. 437, Issue 7062 https://doi.org/10.1038/nature04086	journal	October 2005
Probe current distribution characterization technique for focused ion beam Tan, Shida; Livengood, Richard; Greenzweig, Yuval Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 30, Issue 6 https://doi.org/10.1116/1.4766882	journal	November 2012
Efficient fiber-to-waveguide coupling by a lens on the end of the optical fiber fabricated by focused ion beam milling Schiappelli, F. Microelectronic Engineering, Vol. 73-74 https://doi.org/10.1016/j.mee.2004.02.077	journal	June 2004
Improved drift in two-phase, long-channel, shallow buried-channel CCDs with longitudinally nonuniform storage-gate implants Lattes, A. L.; Munroe, S. C.; Seaver, M. M. IEEE Transactions on Electron Devices, Vol. 39, Issue 7 https://doi.org/10.1109/16.141248	journal	July 1992
Focussed ion beam machined cantilever aperture probes for near‐field optical imaging Jin, E. X.; Xu, X. Journal of Microscopy, Vol. 229, Issue 3 https://doi.org/10.1111/j.1365-2818.2008.01935.x	journal	March 2008
Nanofabrication Masuda, Yoshitake https://doi.org/10.5772/1370	book	December 2011
Ion beam lithography for direct patterning of high accuracy large area X-ray elements in gold on membranes Nadzeyka, A.; Peto, L.; Bauerdick, S. Microelectronic Engineering, Vol. 98 https://doi.org/10.1016/j.mee.2012.07.036	journal	October 2012
Application of mass-separated focused ion beams in nano-technology Bischoff, L. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 266, Issue 8 https://doi.org/10.1016/j.nimb.2007.12.008	journal	April 2008
Deep reactive ion etching and focused ion beam combination for nanotip fabrication Villanueva, G.; Plaza, J. A.; Sánchez-Amores, A. Materials Science and Engineering: C, Vol. 26, Issue 2-3 https://doi.org/10.1016/j.msec.2006.01.002	journal	March 2006
Fabrication and validation of fused silica NIL templates incorporating different length scale features Lalev, G.; Petkov, P.; Sykes, N. Microelectronic Engineering, Vol. 86, Issue 4-6 https://doi.org/10.1016/j.mee.2009.01.074	journal	April 2009
Processing of photonic crystal nanocavity for quantum information in diamond Bayn, Igal; Meyler, Boris; Lahav, Alex Diamond and Related Materials, Vol. 20, Issue 7 https://doi.org/10.1016/j.diamond.2011.05.002	journal	July 2011
Ion beam Lithography and Nanofabrication: a Review Watt, F.; Bettiol, A. A.; Van Kan, J. A. International Journal of Nanoscience, Vol. 04, Issue 03 https://doi.org/10.1142/S0219581X05003139	journal	June 2005
Recent developments in micromilling using focused ion beam technology Tseng, Ampere A. Journal of Micromechanics and Microengineering, Vol. 14, Issue 4, p. R15-R34 https://doi.org/10.1088/0960-1317/14/4/R01	journal	January 2004
Fabrication of planar photonic crystals in a chalcogenide glass using a focused ion beam Freeman, Darren; Madden, Steve; Luther-Davies, Barry Optics Express, Vol. 13, Issue 8 https://doi.org/10.1364/OPEX.13.003079	journal	April 2005
Focused gold ions beam for localized epitaxy of semiconductor nanowires Gierak, J.; Madouri, A.; Bourhis, E. Microelectronic Engineering, Vol. 87, Issue 5-8 https://doi.org/10.1016/j.mee.2009.11.164	journal	May 2010
Recent Advances in Nanofabrication Techniques and Applications Cui, Bo https://doi.org/10.5772/859	book	December 2011
A direct-write, resistless hard mask for rapid nanoscale patterning of diamond McKenzie, Warren; Pethica, John; Cross, Graham Diamond and Related Materials, Vol. 20, Issue 5-6 https://doi.org/10.1016/j.diamond.2011.03.008	journal	May 2011
Micromixing Within Microfluidic Devices Capretto, Lorenzo; Cheng, Wei; Hill, Martyn Microfluidics https://doi.org/10.1007/128_2011_150	book	January 2011
Elastic relaxation and correlation of local strain gradients with ferroelectric domains in (001) BiFeO ₃ nanostructures Klug, Jeffrey A.; Holt, Martin V.; Premnath, Ramesh Nath Applied Physics Letters, Vol. 99, Issue 5 https://doi.org/10.1063/1.3605594	journal	August 2011
High brightness inductively coupled plasma source for high current focused ion beam applications Smith, N. S.; Skoczylas, W. P.; Kellogg, S. M. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 24, Issue 6 https://doi.org/10.1116/1.2366617	journal	January 2006
Focused ion beams techniques for nanomaterials characterization Langford, Richard M. Microscopy Research and Technique, Vol. 69, Issue 7 https://doi.org/10.1002/jemt.20324	journal	January 2006
Carbon nanowires made on diamond surface by focused ion beam Zaitsev, Alexander M. physica status solidi (a), Vol. 202, Issue 10 https://doi.org/10.1002/pssa.200521090	journal	July 2005

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