Generation of uniform low-temperature plasma in a pulsed non-self-sustained glow discharge with a large-area hollow cathode
- Russian Academy of Sciences, Institute of High-Current Electronics, Siberian Branch (Russian Federation)
Generation of plasma in a pulsed non-self-sustained glow discharge with a hollow cathode with an area of ≥2 m{sup 2} at gas pressures of 0.4–1 Pa was studied experimentally. At an auxiliary arc-discharge current of 100 A and a main discharge voltage of 240 V, a pulse-periodic glow discharge with a current amplitude of 370 A, pulse duration of 340 μs, and repetition rate of 1 kHz was obtained. The possibility of creating a uniform gas-discharge plasma with a density of up to 10{sup 12} cm{sup −3} and an electron temperature of 1 eV in a volume of >0.2 m{sup 3} was demonstrated. Such plasma can be efficiently used to treat material surfaces and generate pulsed ion beams with a current density of up to 15 mA/cm{sup 2}.
- OSTI ID:
- 22614055
- Journal Information:
- Plasma Physics Reports, Vol. 43, Issue 1; Other Information: Copyright (c) 2017 Pleiades Publishing, Ltd.; Country of input: International Atomic Energy Agency (IAEA); ISSN 1063-780X
- Country of Publication:
- United States
- Language:
- English
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