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Title: Hydrogen doping in HfO{sub 2} resistance change random access memory

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.4940369· OSTI ID:22489374
; ;  [1]
  1. Department of Electrical Engineering, Stanford University, Stanford, California 94305 (United States)

The structures and energies of hydrogen-doped monoclinic hafnium dioxide were calculated using density-functional theory. The electronic interactions are described within the LDA + U formalism, where on-site Coulomb corrections are applied to the 5d orbital electrons of Hf atoms and 2p orbital electrons of the O atoms. The effects of charge state, defect-defect interactions, and hydrogenation are investigated and compared with experiment. It is found that hydrogenation of HfO{sub 2} resistance-change random access memory devices energetically stabilizes the formation of oxygen vacancies and conductive vacancy filaments through multiple mechanisms, leading to improved switching characteristic and device yield.

OSTI ID:
22489374
Journal Information:
Applied Physics Letters, Vol. 108, Issue 4; Other Information: (c) 2016 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
Country of Publication:
United States
Language:
English