The effects of plasma inhomogeneity on the nanoparticle coating in a low pressure plasma reactor
- Physics Department, Faculty of Science, Sahand University of Technology, 51335-1996 Tabriz (Iran, Islamic Republic of)
A self-consistent model is used to study the surface coating of a collection of charged nanoparticles trapped in the sheath region of a low pressure plasma reactor. The model consists of multi-fluid plasma sheath module, including nanoparticle dynamics, as well as the surface deposition and particle heating modules. The simulation results show that the mean particle radius increases with time and the nanoparticle size distribution is broadened. The mean radius is a linear function of time, while the variance exhibits a quadratic dependence. The broadening in size distribution is attributed to the spatial inhomogeneity of the deposition rate which in turn depends on the plasma inhomogeneity. The spatial inhomogeneity of the ions has strong impact on the broadening of the size distribution, as the ions contribute both in the nanoparticle charging and in direct film deposition. The distribution width also increases with increasing of the pressure, gas temperature, and the ambient temperature gradient.
- OSTI ID:
- 22486483
- Journal Information:
- Physics of Plasmas, Vol. 22, Issue 10; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 1070-664X
- Country of Publication:
- United States
- Language:
- English
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