Nano-structural Characteristics of N-doped ZnO Thin Films and Fabrication of Film Bulk Acoustic Resonator Devices

Journal Article · Fri Dec 23 00:00:00 EST 2011 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.3666352· OSTI ID:21612391

Lee, E J; Zhang, R R; Yoon, G W ^[1]; Park, J D ^[2]

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1. Department of Electrical Engineering, KAIST, Daejeon (Korea, Republic of)
2. Agency for Defense Development, Daejeon (Korea, Republic of)

N-doped ZnO thin films (ZnO:N) with c-axis preferred orientation were prepared on p-Si(100) wafers, using an RF magnetron sputter deposition. For ZnO deposition, N{sub 2}O gas was employed as a dopant source and various deposition conditions such as N{sub 2}O gas fraction and RF power were applied. In addition, the film bulk acoustic resonator (FBAR) devices with three kinds of top electrodes patterns were fabricated by using the N-doped ZnO thin films as the piezoelectric layers. The depth profiles of the nitrogen [N] atoms incorporated into the ZnO thin films were investigated by an Auger Electron Spectroscopy (AES) and the nano-scale structural characteristics of the N-doped ZnO (ZnO:N) thin films were also investigated by a scanning electron microscope (SEM) technique. The fabricated resonators were evaluated by measuring the return loss (S{sub 11}) characteristics using a probe station and E8361A PNA Network Analyzer.

• OSTI ID: 21612391
• Journal Information: AIP Conference Proceedings, Vol. 1399, Issue 1; Conference: 30. international conference on the physics of semiconductors, Seoul (Korea, Republic of), 25-30 Jul 2010; Other Information: DOI: 10.1063/1.3666352; (c) 2011 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
AUGER ELECTRON SPECTROSCOPY
CRYSTAL STRUCTURE
DEPOSITION
DOPED MATERIALS
FABRICATION
GRAIN ORIENTATION
LAYERS
NITROGEN
NITROUS OXIDE
PIEZOELECTRICITY
P-TYPE CONDUCTORS
RESONATORS
SCANNING ELECTRON MICROSCOPY
SILICON
SPUTTERING
THIN FILMS
ZINC OXIDES
CHALCOGENIDES
ELECTRICITY
ELECTRON MICROSCOPY
ELECTRON SPECTROSCOPY
ELECTRONIC EQUIPMENT
ELEMENTS
EQUIPMENT
FILMS
MATERIALS
MICROSCOPY
MICROSTRUCTURE
NITROGEN COMPOUNDS
NITROGEN OXIDES
NONMETALS
ORIENTATION
OXIDES
OXYGEN COMPOUNDS
SEMICONDUCTOR MATERIALS
SEMIMETALS
SPECTROSCOPY
ZINC COMPOUNDS