A large gap of radio frequency dielectric barrier atmospheric pressure glow discharge
- Laboratory of Plasma Physics and Materials, Beijing Institute of Graphic Communication, Beijing 102600 (China)
A large gap was acquired between electrodes (up to 5.5 mm) of Ar atmospheric pressure glow discharge in radio frequency dielectric barrier discharge (rf-DBD). The discharge of Ar plasma was characterized by I-V curve and Lissajous plot, and the effective power of the discharge was calculated based on the measured Lissajous plot and found to be higher than 90% of the input power. To gain a thorough understanding of the mechanism, the rf-DBD with a single dielectric barrier layer operating in gamma mode glow discharge of N{sub 2} plasma was diagnosed in spatial resolution through optical emission spectroscopy. It was concluded that secondary electron emission might be responsible for the sustainable glow discharge in the large gap rf-DBD plasma.
- OSTI ID:
- 21347249
- Journal Information:
- Applied Physics Letters, Vol. 96, Issue 4; Other Information: DOI: 10.1063/1.3299010; (c) 2010 American Institute of Physics; ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ARGON
ATMOSPHERIC PRESSURE
DIELECTRIC MATERIALS
ELECTRON EMISSION
EMISSION SPECTROSCOPY
GLOW DISCHARGES
HIGH-FREQUENCY DISCHARGES
LANGMUIR PROBE
NITROGEN
PLASMA
PLASMA DIAGNOSTICS
RADIOWAVE RADIATION
SPATIAL RESOLUTION
ELECTRIC DISCHARGES
ELECTRIC PROBES
ELECTROMAGNETIC RADIATION
ELEMENTS
EMISSION
FLUIDS
GASES
MATERIALS
NONMETALS
PROBES
RADIATIONS
RARE GASES
RESOLUTION
SPECTROSCOPY