Electron energy relaxation of electron swarms in RF fields
- Institute of Physics, Zemun (Yugoslavia)
- Keio Univ., Yokahama (Japan)
Efficient modeling of RF discharges requires approximate treatment of non-local transport of electrons both in time and space. Exact solution of space and time dependent Boltzmann equation is both very difficult and time consuming when taken in conjunction with self consistent calculation of the development of electric field and so are the Monte Carlo simulations. Therefore approximate methods have been developed based on fluid models which make modeling of one dimensional RF plasmas tractable and modeling of two dimensional plasmas becomes possible. The crucial problem in such numerical models is the non local electron transport and it is treated by different approximate schemes, one of the most successful being the Relaxation Continuum Theory (RCT). Critical part of the RCT scheme is application of relaxation times for various processes. The most important is the energy relaxation lifetime but it is of limited value when high energy electrons are important component of the energy distribution function. In addition behavior of different inelastic processes will depend not on the threshold energy and energy distribution time dependence above that threshold. In this paper we follow the relaxation of the mean energy and other properties of electron swarms in the high frequency RF field. We use both the specially developed Monte Carlo simulation technique-(MCS) and the direct numeric procedure for solving the Boltzmann equation. As the basis for calculations we use the cross section set for the Reid`s ramp model which has been used extensively in tests of numerical techniques and thus the accurate values of the transport coefficients are very well known.
- OSTI ID:
- 212778
- Report Number(s):
- CONF-950749-; TRN: 96:009946
- Resource Relation:
- Conference: 22. international conference on phenomena in ionized gases, Hoboken, NJ (United States), 31 Jul - 4 Aug 1995; Other Information: PBD: 1995; Related Information: Is Part Of XXII International conference on phenomena in ionized gases. Contributed papers 2; Becker, K.H.; Carr, W.E.; Kunhardt, E.E. [eds.]; PB: 226 p.
- Country of Publication:
- United States
- Language:
- English
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