Ion Beam Extraction from Large Bore 11 to 13 GHz ECR Ion Source with a Pair of Cylindrically Comb-Shaped Magnetic Fields

Journal Article · Mon Nov 03 00:00:00 EST 2008 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.3033680· OSTI ID:21251720

Watanabe, T; Satani, T; Matsui, Y; Sato, F; Kato, Y; Iida, T ^[1]

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1. Division of Electrical, Electronic and Information Engineering, Graduate School of Engineering, Osaka Univ. 2-1 Yamada-oka, Suita-shi, Osaka 565-0871 (Japan)

We have developed a large bore electron cyclotron resonance (ECR) ion source with cylindrically comb-shaped magnetic field configuration to realize high current density and comparatively large bore ion beam which can be used for beam processes under low pressure and low microwave power. It is found that the plasma confinement of cylindrically comb-shaped magnetic fields is more effective than that of simple multipole magnetic fields. We have constructed a large bore ion beam extractor and set to the ECR ion source. The electron density attained to 10{sup 17{approx}}{sup 18} m{sup -3} order, ion saturation current density is about 80{approx}100 A/m{sup 2} under low pressure 0.03 Pa and low microwave power 200 W. We conduct the first trial of ion beam extraction from the ECR ion source. We investigate the ion beam characteristics for extraction voltages and Ar gas pressures. The extracted ion beam current increases in proportion to extraction voltages, however at present the beam current is lower than those estimated from ion saturation current. We observed the self-similar distribution of the extracted ion beam which is comparatively large bore. We are now investigating the ion beam extraction and going to optimize the electrode gap, the electrode position and shape of multi-holes of the extractor.

• OSTI ID: 21251720
• Journal Information: AIP Conference Proceedings, Vol. 1066, Issue 1; Conference: 17. international conference on ion implantation technology, Monterey, CA (United States), 8-13 Jun 2008; Other Information: DOI: 10.1063/1.3033680; (c) 2008 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
43 PARTICLE ACCELERATORS
BEAM CURRENTS
CURRENT DENSITY
ECR ION SOURCES
ELECTRIC POTENTIAL
ELECTRODES
ELECTRON CYCLOTRON-RESONANCE
ELECTRON DENSITY
GHZ RANGE 01-100
ION BEAMS
MAGNETIC FIELD CONFIGURATIONS
MAGNETIC FIELDS
MICROWAVE RADIATION
PLASMA CONFINEMENT