Bianalyte mass detection with a single resonant microcantilever
- State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050 (China) and Graduate University, Chinese Academy of Sciences, Beijing 100049 (China)
Mass-loading detection of multiple kinds of analyte with a single resonant microcantilever is proposed and experimentally validated. By exciting the cantilever in different resonance modes and adsorbing the different analytes at different locations of the cantilever, the specific mass of either kind of analyte can be independently detected. The proposed micromechanical resonant cantilever sensor is designed and fabricated using silicon micromachining techniques. Used as simulant adsorbates, Au and Cr thin films are selectively implemented on the cantilever to verify the bianalyte detecting function. The testing results are consistent with the theoretical analysis, with the detection error being an order of magnitude lower than the analyzed mass.
- OSTI ID:
- 21175851
- Journal Information:
- Applied Physics Letters, Vol. 94, Issue 1; Other Information: DOI: 10.1063/1.3050460; (c) 2009 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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