Side extraction duoPIGatron-type ion source

Journal Article · Fri Feb 15 00:00:00 EST 2008 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.2802286· OSTI ID:21103967

Gushenets, V I; Oks, E M; Hershcovitch, Ady; Johnson, B M ^[1]

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1. High Current Electronics Institute, Russian Academy of Sciences, Tomsk 634055 (Russian Federation)

We have designed and constructed a compact duoPIGatron-type ion source, for possible use in ion implanters, in which ions are extracted from a side aperture in contrast to conventional duoPIGatron sources with axial ion extraction. The size of the side extraction aperture is 1x40 mm{sup 2}. The ion source was developed to study physical and technological aspects relevant to an industrial ion source. The side extraction duoPIGatron has a stable arc, uniformly bright illumination, and dense plasma. The present work describes some operating parameters of the ion source using argon and BF{sub 3}. Total unanalyzed beam currents were 40 mA with Ar at an arc current of 7 A and 13 mA with BF{sub 3} gas at an arc current of 9 A.

• OSTI ID: 21103967
• Journal Information: Review of Scientific Instruments, Vol. 79, Issue 2; Conference: ICIS 2007: 12. international conference on ion sources, Jeju (Korea, Republic of), 26-31 Aug 2007; Other Information: DOI: 10.1063/1.2802286; (c) 2008 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
APERTURES
ARGON
BEAM CURRENTS
BEAM EXTRACTION
BORON FLUORIDES
DUOPLASMATRONS
ELECTRIC ARCS
INDIUM IONS
ION BEAMS
ION SOURCES