Nitrogen-doped p-type ZnO films prepared from nitrogen gas radio-frequency magnetron sputtering
- Department of Electronic Engineering, Fortune Institute of Technology, Kaohsiung County, 83160, Taiwan (China)
Wide band gap nitrogen-doped p-type ZnO films are prepared by radio-frequency magnetron sputtering from a 99.99% purity ZnO target. The sputtering gas is Ar mixed with various flow rates of nitrogen gas. Hole concentrations increase from 1.89x10{sup 15} to 2.11x10{sup 19} cm{sup -3} as the N{sub 2} flow rate decreases from 15 to 6 SCCM (SCCM denotes cubic centimeter per minute at STP), i.e., increasing N{sub 2} flow rate above 6 SCCM decreases the p-type carrier concentration. Microphotoluminescence (PL) spectra peaks are in the near-UV range and change from 384 nm (3.23 eV) to 374 nm (3.32 eV) with increasing N{sub 2} flow rate. The PL peaks agree with the band gap of bulk ZnO, which comes from the recombination of free excitons. Raman spectra show six peaks: 436 (E{sub 2} high-frequency phonon mode for undoped ZnO film), 581 [A{sub 1} (LO) mode in ZnO:N film], 275, 508, 640, and 854 cm{sup -1} (local vibrational modes of Raman features in N-doped ZnO film)
- OSTI ID:
- 20884697
- Journal Information:
- Journal of Applied Physics, Vol. 100, Issue 5; Other Information: DOI: 10.1063/1.2337766; (c) 2006 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
- Country of Publication:
- United States
- Language:
- English
Similar Records
Spectroscopic properties of nitrogen doped hydrogenated amorphous carbon films grown by radio frequency plasma-enhanced chemical vapor deposition
Identification of nitrogen chemical states in N-doped ZnO via x-ray photoelectron spectroscopy