Confocal operation of a transmission electron microscope with two aberration correctors
- Trinity College Dublin, School of Physics, Dublin 2 (Ireland)
The authors demonstrate that confocal imaging trajectories can be established in a transmission electron microscope fitted with two spherical aberration correctors. An atomic-scale electron beam, focused by aberration-corrected illumination optics, is directly imaged by a second aberration-corrected system. The initial experiment described indicates how aberration-corrected scanning confocal electron microscopy will allow three-dimensional imaging and analysis of materials with atomic lateral resolution and with a depth resolution of a few nanometers. The depth resolution in the confocal mode is shown to be robust to the uncorrected chromatic aberration of the lenses, unlike depth sectioning using a single lens.
- OSTI ID:
- 20861131
- Journal Information:
- Applied Physics Letters, Vol. 89, Issue 12; Other Information: DOI: 10.1063/1.2356699; (c) 2006 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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