Effects of heat generation during electron-beam-induced deposition of nanostructures
- Department of Materials Science and Engineering, University of Tennessee, Knoxville, Tennessee 37996-2200 (United States)
To elucidate the effects of beam heating in electron-beam-induced deposition (EBID), a Monte Carlo electron-solid interaction model has been employed to calculate the energy deposition profiles in bulk and nanostructured SiO{sub 2}. Using these profiles, a finite element model was used to predict the nanostructure tip temperatures for standard experimental EBID conditions. Depending on the beam energy, beam current, and nanostructure geometry, the heat generated can be substantial. This heat source can subsequently limit the EBID growth by thermally reducing the mean stay time of the precursor gas. Temperature-dependent EBID growth experiments qualitatively verified the results of the electron-beam-heating model. Additionally, experimental trends for the growth rate as a function of deposition time supported the conclusion that electron-beam-induced heating can play a major role in limiting the EBID growth rate of SiO{sub 2} nanostructures.
- OSTI ID:
- 20711769
- Journal Information:
- Journal of Applied Physics, Vol. 97, Issue 12; Other Information: DOI: 10.1063/1.1942627; (c) 2005 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
- Country of Publication:
- United States
- Language:
- English
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