The change of optical, electrical and structural properties of sputtered indium tin oxide films by application of a new reactive sputter atmosphere
- Humboldt-Univ., Berlin (Germany). Inst. of Physical and Theoretical Chemistry
Highly qualitative indium tin oxide (ITO) films were deposited by reactive dc-sputter technique on glass and quartz substrates. Both pure H{sub 2}O vapor and pure O{sub 2} have been used as reactive sputtering atmosphere. The optical constants refractive index and absorption coefficient were calculated from reflection and transmission spectra in the infrared (IR) region. Using the Drude theory the electrical parameters free carrier concentration and carrier mobility of the ITO-films were contactless determined from IR reflection spectra. The dc-H{sub 2}O-sputtered ITO-films show improved optical and electrical properties. For application as transparent window material they distinguish by high visual (VIS) transmittance and high IR-reflectance. Moreover these ITO-films show a high free carrier concentration of N = 6 {times} 10{sup 20}cm{sup {minus}3} directly after deposition compared with N = 4{times}10{sup 20}cm{sup {minus}3} for dc-O{sub 2}-sputtered ITO-films after thermal annealing. The differences between optical and electrical properties of dc-O{sub 2}{sup {minus}} and dc-H{sub 2}O-sputtered ITO-films are discussed in regard to their crystal structure and surface morphology.
- OSTI ID:
- 194861
- Report Number(s):
- CONF-9404167-; ISBN 0-8194-1564-2; TRN: IM9611%%363
- Resource Relation:
- Conference: SPIE 13: international symposium on optical materials technology for energy efficiency and solar energy conversion, Freiburg (Germany), 18-22 Apr 1994; Other Information: PBD: 1994; Related Information: Is Part Of Optical materials technology for energy efficiency and solar energy conversion XIII; Wittwer, V. [ed.] [Fraunhofer Inst. for Solar Energy Systems, Freiburg (Germany)]; Granqvist, C.G. [ed.] [Uppsala Univ. (Sweden). Dept. of Technology]; Lampert, C. [ed.] [Lawrence Berkeley Lab., Berkeley, CA (United States). Energy and Environment Div.]; PB: 863 p.; Proceedings/SPIE, Volume 2255
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATION
INDIUM OXIDES
PHYSICAL PROPERTIES
SURFACE COATING
MICROSTRUCTURE
TIN OXIDES
WINDOWS
SPECTRALLY SELECTIVE SURFACES
WATER
OXYGEN
CONTROLLED ATMOSPHERES
OPTICAL PROPERTIES
ELECTRICAL PROPERTIES
SEMICONDUCTOR MATERIALS
USES
GLAZING MATERIALS
SPUTTERING
EXPERIMENTAL DATA