Scalable synthesis of supported catalysts using fluidized bed atomic layer deposition

Lu, Zheng; Yanguas-Gil, Angel; Kang, Donghyeon; Darapaneni, Pragathi; Mane, Anil U.; Marshall, Christopher L.; Elam, Jeffrey W.

doi:10.1116/6.0001891

Title: Scalable synthesis of supported catalysts using fluidized bed atomic layer deposition

Journal Article · Mon Jun 13 00:00:00 EDT 2022 · Journal of Vacuum Science and Technology A

DOI:https://doi.org/10.1116/6.0001891· OSTI ID:1902316

Lu, Zheng ^[1];

^[1]; Kang, Donghyeon ^[1];

^[1]; Mane, Anil U. ^[1]; Marshall, Christopher L. ^[1]; Elam, Jeffrey W. ^[1]

Argonne National Lab. (ANL), Argonne, IL (United States)

Overcoating layers deposited on the surface of heterogeneous catalysts using atomic layer deposition (ALD) have been shown to increase catalyst activity, lifetime, and selectivity. In this study, we performed Al₂O₃ ALD and Pd ALD in a commercial fluidized bed reactor on high surface area mesoporous powder supports to create overcoated catalysts with high precursor utilization. We investigated the reaction mechanism for both Al₂O₃ ALD and Pd ALD using in situ mass spectrometry and developed a mathematical model to understand the precursor saturation behaviors. We characterized the catalyst samples using a variety of techniques to measure the surface area, porosity, composition, and surface chemistry of the overcoated catalysts. Finally, we used propane dehydrogenation as a probe reaction to evaluate the performance of the catalysts prepared by fluidized bed ALD.

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Research Organization:: Argonne National Laboratory (ANL), Argonne, IL (United States)

Sponsoring Organization:: USDOE Office of Science (SC); USDOE Laboratory Directed Research and Development (LDRD) Program

Grant/Contract Number:: AC02-06CH11357

OSTI ID:: 1902316

Alternate ID(s):: OSTI ID: 1872120

Journal Information:: Journal of Vacuum Science and Technology A, Vol. 40, Issue 4; ISSN 0734-2101

Publisher:: American Vacuum Society / AIPCopyright Statement

Country of Publication:: United States

Language:: English

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Title: Scalable synthesis of supported catalysts using fluidized bed atomic layer deposition

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