Electronic and Phonon Deformation Potentials of GaN and AlN:Ab initio Calculations versus Experiment
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December 2002 |
The impact of residual stress on resonating piezoelectric devices
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November 2020 |
Microstructure and mechanical properties of stress-tailored piezoelectric AlN thin films for electro-acoustic devices
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June 2017 |
High resolution determination of local residual stress gradients in single- and multilayer thin film systems
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January 2016 |
Low Thermal Resistances at GaN–SiC Interfaces for HEMT Technology
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March 2012 |
Advances in piezoelectric thin films for acoustic biosensors, acoustofluidics and lab-on-chip applications
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August 2017 |
Impact of growth conditions on stress and quality of aluminum nitride (AlN) thin buffer layers: Impact of growth conditions on AlN thin buffer layers
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April 2016 |
An AlN MEMS Piezoelectric Microphone for Aeroacoustic Applications
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April 2012 |
Structure, optical spectra and biaxial stress of (0002) AlN epilayers grown on c-sapphire by high-temperature chemical vapor deposition: Structure, optical spectra and biaxial stress of (0002) AlN epilayers
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June 2014 |
Comparative material study on RF and DC magnetron sputtered ZnO:Al films
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April 2006 |
Characterization of AlScN-Based Multilayer Systems for Piezoelectric Micromachined Ultrasound Transducer (pMUT) Fabrication
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April 2021 |
Influence of deposition parameters on the stress of magnetron sputter-deposited AlN thin films on Si(100) substrates
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February 2003 |
Expression for Effect of Porosity on Elastic Modulus of Polycrystalline Refractory Materials, Particularly Aluminum Oxide
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December 1961 |
Investigation of mechanical properties of transparent conducting oxide thin films
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October 2003 |
An AlN/Al 0.85 Ga 0.15 N high electron mobility transistor
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July 2016 |
QUANTUM ESPRESSO: a modular and open-source software project for quantum simulations of materials
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September 2009 |
Thickness dependent residual stress in sputtered AlN thin films
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November 2012 |
Rietveld-refinement study of aluminium and gallium nitrides
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November 2004 |
Raman spectroscopy of sputtered AlN films: E2(high) biaxial strain dependence
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August 2006 |
Band parameters for nitrogen-containing semiconductors
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September 2003 |
Piezoelectric and structural properties of c-axis textured aluminium scandium nitride thin films up to high scandium content
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June 2018 |
A comparison of Raman, FTIR and ATR-FTIR micro spectroscopy for imaging human skin tissue sections
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January 2013 |
Piezoelectric Aluminum Nitride Vibrating Contour-Mode MEMS Resonators
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January 2006 |
Local residual stress monitoring of aluminum nitride MEMS using UV micro-Raman spectroscopy
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January 2016 |
Review of piezoelectric micromachined ultrasonic transducers and their applications
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September 2017 |
Critical assessment of the determination of residual stress profiles in thin films by means of the ion beam layer removal method
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August 2014 |
The Tension of Metallic Films Deposited by Electrolysis
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May 1909 |
Contributed Review: Experimental characterization of inverse piezoelectric strain in GaN HEMTs via micro-Raman spectroscopy
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June 2016 |
Growth and Comparison of Residual Stress of AlN Films on Silicon (100), (110) and (111) Substrates
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November 2017 |
AlN-based flexible piezoelectric skin for energy harvesting from human motion
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June 2016 |
Influence of the texture on Raman and X-ray diffraction characteristics of polycrystalline AlN films
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November 2008 |
Vibrational Spectroscopy of Aluminum Nitride
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May 1993 |
Aluminum Nitride Ultrasonic Air-Coupled Actuator
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April 2011 |
Phonon deformation potentials of wurtzite AlN
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February 2003 |
Properties of strained wurtzite GaN and AlN: Ab initio studies
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September 2002 |
Effect of sputtering gas pressure and nitrogen concentration on crystal orientation and residual stress in sputtered AlN films
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August 2002 |
Anharmonic decay of phonons in strain-free wurtzite AlN
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September 2004 |
Influence of the Crystal Texture on Raman Spectroscopy of the AlN Films Prepared by Pulse Laser Deposition
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January 2013 |
Raman characterization and stress analysis of AlN grown on SiC by sublimation
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November 2002 |
A Review of Raman Thermography for Electronic and Opto-Electronic Device Measurement With Submicron Spatial and Nanosecond Temporal Resolution
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December 2016 |
Comparison of the structural properties and residual stress of AlN films deposited by dc magnetron sputtering and high power impulse magnetron sputtering at different working pressures
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January 2014 |
Piezoelectric ultrasonic transducer based on flexible AlN
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June 2014 |
Analysis of the residual stress distribution in AlGaN/GaN high electron mobility transistors
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March 2013 |
Crystal structure refinement of AlN and GaN
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September 1977 |
AlN-based surface acoustic wave resonators for temperature sensing applications
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August 2015 |
Macroscopic polarization in crystalline dielectrics: the geometric phase approach
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July 1994 |
Nonmetallic crystals with high thermal conductivity
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January 1973 |
Raman Scattering Spectroscopy of Residual Stresses in Epitaxial AlN Films
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February 2011 |
Strain-related phenomena in GaN thin films
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December 1996 |
Influence of Cr-doping on microstructure and piezoelectric response of AlN films
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November 2009 |
Mechanical properties and reliability of aluminum nitride thin films
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January 2019 |
Piezoelectric properties and residual stress of sputtered AlN thin films for MEMS applications
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September 2004 |
Residual stress in AlN films grown on sapphire substrates by molecular beam epitaxy
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May 2016 |
Thin Film Materials
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book
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July 2010 |
Phonons and related crystal properties from density-functional perturbation theory
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July 2001 |
Properties of AlN film grown on Si (111)
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February 2016 |
The influence of sputter deposition parameters on piezoelectric and mechanical properties of AlN thin films
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September 2010 |
Post-CMOS-Compatible Aluminum Nitride Resonant MEMS Accelerometers
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June 2009 |
Simultaneous measurement of temperature, stress, and electric field in GaN HEMTs with micro-Raman spectroscopy
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November 2017 |
Raman spectroscopic calibrations of phonon deformation potentials in wurtzitic AlN
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November 2012 |
Piezoelectric Micromachined Ultrasound Transducer (PMUT) Arrays for Integrated Sensing, Actuation and Imaging
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April 2015 |
Thermal expansion at elevated temperatures. II. Aluminium oxide: experimental data between 100 and 800 K and their analysis
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May 1972 |
Analysis and optimization of sputter deposited AlN-layers for flexural plate wave devices
- Reusch, Markus; Holc, Katarzyna; Pletschen, Wilfried
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Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 34, Issue 5
https://doi.org/10.1116/1.4959580
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September 2016 |
Preparation of high-quality stress-free (001) aluminum nitride thin film using a dual Kaufman ion-beam source setup
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January 2019 |
Pressure Dependence of the Elastic Constants of Single Crystalline Aluminum Oxide
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January 1968 |
Raman spectroscopy of GaN, AlGaN and AlN for process and growth monitoring/control
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January 2001 |
Defect and stress characterization of AlN films by Raman spectroscopy
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December 2006 |
An aluminium nitride light-emitting diode with a wavelength of 210 nanometres
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May 2006 |
Temperature dependence of the thermal expansion of AlN
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March 2009 |
Influence of sputtering parameters on structures and residual stress of AlN films deposited by DC reactive magnetron sputtering at room temperature
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January 2013 |
Vibrational properties of AlN grown on (111)-oriented silicon
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March 2001 |
Piezoelectric aluminum nitride thin films for microelectromechanical systems
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November 2012 |
Thickness dependence of the properties of highly c -axis textured AlN thin films
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March 2004 |
Stress and piezoelectric properties of aluminum nitride thin films deposited onto metal electrodes by pulsed direct current reactive sputtering
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June 2001 |
Effect of beam voltage on the properties of aluminium nitride prepared by ion beam assisted deposition
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journal
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August 1996 |
Study on strain and piezoelectric polarization of AlN thin films grown on Si
- Deng, Yongzhen; Kong, Yuechan; Zheng, Youdou
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Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 23, Issue 4
https://doi.org/10.1116/1.1927533
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July 2005 |
Effect of intrinsic stress on preferred orientation in AlN thin films
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February 2004 |
Nanometer-thin ALD-Al 2 O 3 for the improvement of the structural quality of AlN grown on sapphire substrate by MOVPE: Improvement of structural quality of AlN grown on sapphire substrate by MOVPE
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November 2016 |
Raman scattering from LO phonon‐plasmon coupled modes in gallium nitride
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January 1994 |
Reduction of residual stress in AlN thin films synthesized by magnetron sputtering technique
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October 2017 |
Temperature dependence of Raman-active modes in AlN
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April 2006 |
Micro-Raman Study of Wurtzite AlN Layers Grown on Si(111)
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December 2001 |
Phonon dispersion and Raman scattering in hexagonal GaN and AlN
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November 1998 |
Origins of residual stress in thin films: Interaction between microstructure and growth kinetics
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November 2016 |
Deformation potentials of the E2(high) phonon mode of AlN
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August 2002 |
Effect of pressure on optical phonon modes and transverse effective charges in and
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June 2001 |
Phonon deformation potentials of α-GaN and -AlN: An ab initio calculation
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journal
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July 2000 |
Vibration energy harvesting with aluminum nitride-based piezoelectric devices
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journal
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August 2009 |
Intrinsic stress in A1N prepared by dual-ion-beam sputtering
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November 1987 |