Atomic Layer Deposition of Sodium Phosphorus Oxynitride: A Conformal Solid-State Sodium-Ion Conductor

Nuwayhid, R. Blake; Jarry, Angelique; Rubloff, Gary W.; Gregorczyk, Keith E.

doi:10.1021/acsami.0c03578

Title: Atomic Layer Deposition of Sodium Phosphorus Oxynitride: A Conformal Solid-State Sodium-Ion Conductor

Journal Article · Tue Apr 21 00:00:00 EDT 2020 · ACS Applied Materials and Interfaces

DOI:https://doi.org/10.1021/acsami.0c03578· OSTI ID:1801461

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^[1]; Rubloff, Gary W. ^[2];

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Department of Materials Science and Engineering, University of Maryland, College Park, Maryland 20742, United States
Department of Materials Science and Engineering, University of Maryland, College Park, Maryland 20742, United States; Institute for Systems Research and the Institute for Research in Electronics and Applied Physics, University of Maryland, Collage Park, Maryland 20742, United States

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Research Organization:: Univ. of Maryland, College Park, MD (United States)

Sponsoring Organization:: USDOE Office of Science (SC)

DOE Contract Number:: SC0001160

OSTI ID:: 1801461

Journal Information:: ACS Applied Materials and Interfaces, Vol. 12, Issue 19; ISSN 1944-8244

Publisher:: American Chemical Society (ACS)

Country of Publication:: United States

Language:: English

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