Micromachined Piezoresistive-sensed Diaphragms for Infrasonic Monitoring
Micromachined, piezoresistive-sensed diaphragms are designed and fabricated specifically for infrasound sensing applications. Relatively large diaphragms, up to 6 mm × 6 mm, are fabricated to meet the high sensitivity requirements of infrasonic monitoring. A double-stack SOI wafer process is used, resulting in a streamlined two-mask process without the need for doping or ion-implantation. Pressure-sensitivities of diaphragms are studied using a custom static calibration set-up. Here, the piezoresistance of longitudinal and transverse resistors are studied over a large pressure range of ±5,500 Pa so that the linear and nonlinear response regions of diaphragms are observed. Measurements are compared against a nonlinear finite element simulation—shown to accurately predict the sensor’s behavior over a large response range.
- Research Organization:
- Univ. of Texas, Austin, TX (United States)
- Sponsoring Organization:
- USDOE
- Grant/Contract Number:
- SC0013829
- OSTI ID:
- 1778105
- Journal Information:
- IEEE Sensors Journal, Vol. 21, Issue 1; ISSN 1530-437X
- Publisher:
- IEEECopyright Statement
- Country of Publication:
- United States
- Language:
- English
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