Top-down fabrication of high-uniformity nanodiamonds by self-assembled block copolymer masks

Zheng, Jiabao; Lienhard, Benjamin; Doerk, Gregory; Cotlet, Mircea; Bersin, Eric; Kim, Harrison Sejoon; Byun, Young-Chul; Nam, Chang-Yong; Kim, Jiyoung; Black, Charles T.; Englund, Dirk

doi:10.1038/s41598-019-43304-5

Title: Top-down fabrication of high-uniformity nanodiamonds by self-assembled block copolymer masks

Journal Article · Mon May 06 00:00:00 EDT 2019 · Scientific Reports

DOI:https://doi.org/10.1038/s41598-019-43304-5· OSTI ID:1619513

;

; Cotlet, Mircea;

; Kim, Harrison Sejoon; Byun, Young-Chul;

; Kim, Jiyoung;

;

Abstract Nanodiamonds hosting colour centres are a promising material platform for various quantum technologies. The fabrication of non-aggregated and uniformly-sized nanodiamonds with systematic integration of single quantum emitters has so far been lacking. Here, we present a top-down fabrication method to produce 30.0 ± 5.4 nm uniformly-sized single-crystal nanodiamonds by block copolymer self-assembled nanomask patterning together with directional and isotropic reactive ion etching. We show detected emission from bright single nitrogen vacancy centres hosted in the fabricated nanodiamonds. The lithographically precise patterning of large areas of diamond by self-assembled masks and their release into uniformly sized nanodiamonds open up new possibilities for quantum information processing and sensing.

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Research Organization:: Brookhaven National Laboratory (BNL), Upton, NY (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: SC0012704

OSTI ID:: 1619513

Alternate ID(s):: OSTI ID: 1529076

Report Number(s):: BNL-211787-2019-JAAM; 6914; PII: 43304

Journal Information:: Scientific Reports, Journal Name: Scientific Reports Vol. 9 Journal Issue: 1; ISSN 2045-2322

Publisher:: Nature Publishing GroupCopyright Statement

Country of Publication:: United Kingdom

Language:: English

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Cited by: 8 works

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References (58)

Fluorescent nanodiamond tracking reveals intraneuronal transport abnormalities induced by brain-disease-related genetic risk factors Haziza, Simon; Mohan, Nitin; Loe-Mie, Yann Nature Nanotechnology, Vol. 12, Issue 4 https://doi.org/10.1038/nnano.2016.260	journal	November 2016
Imprint Lithography with 25-Nanometer Resolution Chou, S. Y.; Krauss, P. R.; Renstrom, P. J. Science, Vol. 272, Issue 5258, p. 85-87 https://doi.org/10.1126/science.272.5258.85	journal	April 1996
An integrated diamond nanophotonics platform for quantum-optical networks Sipahigil, A.; Evans, R. E.; Sukachev, D. D. Science, Vol. 354, Issue 6314 https://doi.org/10.1126/science.aah6875	journal	October 2016
Germanium-Vacancy Single Color Centers in Diamond Iwasaki, Takayuki; Ishibashi, Fumitaka; Miyamoto, Yoshiyuki Scientific Reports, Vol. 5, Issue 1 https://doi.org/10.1038/srep12882	journal	August 2015
DNA-Based Self-Assembly of Fluorescent Nanodiamonds Zhang, Tao; Neumann, Andre; Lindlau, Jessica Journal of the American Chemical Society, Vol. 137, Issue 31 https://doi.org/10.1021/jacs.5b04857	journal	July 2015
Increased negatively charged nitrogen-vacancy centers in fluorinated diamond Cui, Shanying; Hu, Evelyn L. Applied Physics Letters, Vol. 103, Issue 5 https://doi.org/10.1063/1.4817651	journal	July 2013
Nitrogen-Terminated Diamond (111) Surface for Room-Temperature Quantum Sensing and Simulation Chou, Jyh-Pin; Retzker, Alex; Gali, Adam Nano Letters, Vol. 17, Issue 4 https://doi.org/10.1021/acs.nanolett.6b05023	journal	March 2017
Scanning Nanospin Ensemble Microscope for Nanoscale Magnetic and Thermal Imaging Tetienne, Jean-Philippe; Lombard, Alain; Simpson, David A. Nano Letters, Vol. 16, Issue 1 https://doi.org/10.1021/acs.nanolett.5b03877	journal	December 2015
Lead-related quantum emitters in diamond Trusheim, Matthew E.; Wan, Noel H.; Chen, Kevin C. Physical Review B, Vol. 99, Issue 7 https://doi.org/10.1103/PhysRevB.99.075430	journal	February 2019
Engineered Micro- and Nanoscale Diamonds as Mobile Probes for High-Resolution Sensing in Fluid Andrich, Paolo; Alemán, Benjamín J.; Lee, Jonathan C. Nano Letters, Vol. 14, Issue 9 https://doi.org/10.1021/nl501208s	journal	August 2014
Extremely high electron mobility in isotopically-enriched ²⁸ Si two-dimensional electron gases grown by chemical vapor deposition Li, Jiun-Yun; Huang, Chiao-Ti; Rokhinson, Leonid P. Applied Physics Letters, Vol. 103, Issue 16 https://doi.org/10.1063/1.4824729	journal	October 2013
Imaging thermal conductivity with nanoscale resolution using a scanning spin probe Laraoui, Abdelghani; Aycock-Rizzo, Halley; Gao, Yang Nature Communications, Vol. 6, Issue 1 https://doi.org/10.1038/ncomms9954	journal	November 2015
Superconductivity in diamond Ekimov, E. A.; Sidorov, V. A.; Bauer, E. D. Nature, Vol. 428, Issue 6982 https://doi.org/10.1038/nature02449	journal	April 2004
Single $Si$ - $V^{-}$ Centers in Low-Strain Nanodiamonds with Bulklike Spectral Properties and Nanomanipulation Capabilities Rogers, Lachlan J.; Wang, Ou; Liu, Yan Physical Review Applied, Vol. 11, Issue 2 https://doi.org/10.1103/PhysRevApplied.11.024073	journal	February 2019
Observing bulk diamond spin coherence in high-purity nanodiamonds Knowles, Helena S.; Kara, Dhiren M.; Atatüre, Mete Nature Materials, Vol. 13, Issue 1 https://doi.org/10.1038/nmat3805	journal	November 2013
Nanometre-scale thermometry in a living cell Kucsko, G.; Maurer, P. C.; Yao, N. Y. Nature, Vol. 500, Issue 7460 https://doi.org/10.1038/nature12373	journal	July 2013
Boron-doped nanodiamonds as possible agents for local hyperthermia Vervald, A. M.; Burikov, S. A.; Vlasov, I. I. Laser Physics Letters, Vol. 14, Issue 4 https://doi.org/10.1088/1612-202X/aa61bd	journal	March 2017
The properties and applications of nanodiamonds Mochalin, Vadym N.; Shenderova, Olga; Ho, Dean Nature Nanotechnology, Vol. 7, Issue 1 https://doi.org/10.1038/nnano.2011.209	journal	December 2011
Enhancement of the zero phonon line emission from a single nitrogen vacancy center in a nanodiamond via coupling to a photonic crystal cavity Wolters, Janik; Schell, Andreas W.; Kewes, Günter Applied Physics Letters, Vol. 97, Issue 14 https://doi.org/10.1063/1.3499300	journal	October 2010
Large quantum superpositions of a levitated nanodiamond through spin-optomechanical coupling Yin, Zhang-qi; Li, Tongcang; Zhang, Xiang Physical Review A, Vol. 88, Issue 3 https://doi.org/10.1103/PhysRevA.88.033614	journal	September 2013
Coherent control of the silicon-vacancy spin in diamond Pingault, Benjamin; Jarausch, David-Dominik; Hepp, Christian Nature Communications, Vol. 8, Issue 1 https://doi.org/10.1038/ncomms15579	journal	May 2017
Tunable cavity coupling of the zero phonon line of a nitrogen-vacancy defect in diamond Johnson, S.; Dolan, P. R.; Grange, T. New Journal of Physics, Vol. 17, Issue 12 https://doi.org/10.1088/1367-2630/17/12/122003	journal	December 2015
Nanocrystalline diamond as an electronic material: An impedance spectroscopic and Hall effect measurement study Bevilacqua, Mose; Tumilty, Niall; Mitra, Chiranjib Journal of Applied Physics, Vol. 107, Issue 3 https://doi.org/10.1063/1.3291118	journal	February 2010
Coherent control of single spins in silicon carbide at room temperature Widmann, Matthias; Lee, Sang-Yun; Rendler, Torsten Nature Materials, Vol. 14, Issue 2 https://doi.org/10.1038/nmat4145	journal	December 2014
Functionalisation of Detonation Nanodiamond for Monodispersed, Soluble DNA-Nanodiamond Conjugates Using Mixed Silane Bead-Assisted Sonication Disintegration Edgington, Robert; Spillane, Katelyn M.; Papageorgiou, George Scientific Reports, Vol. 8, Issue 1 https://doi.org/10.1038/s41598-017-18601-6	journal	January 2018
Functionality is Key: Recent Progress in the Surface Modification of Nanodiamond Krueger, Anke; Lang, Daniel Advanced Functional Materials, Vol. 22, Issue 5 https://doi.org/10.1002/adfm.201102670	journal	January 2012
Salt-Assisted Ultrasonic Deaggregation of Nanodiamond Turcheniuk, K.; Trecazzi, C.; Deeleepojananan, C. ACS Applied Materials & Interfaces, Vol. 8, Issue 38 https://doi.org/10.1021/acsami.6b08311	journal	September 2016
Modulation of nitrogen vacancy charge state and fluorescence in nanodiamonds using electrochemical potential Karaveli, Sinan; Gaathon, Ophir; Wolcott, Abraham Proceedings of the National Academy of Sciences, Vol. 113, Issue 15 https://doi.org/10.1073/pnas.1504451113	journal	March 2016
All-Optical Initialization, Readout, and Coherent Preparation of Single Silicon-Vacancy Spins in Diamond Rogers, Lachlan J.; Jahnke, Kay D.; Metsch, Mathias H. Physical Review Letters, Vol. 113, Issue 26 https://doi.org/10.1103/PhysRevLett.113.263602	journal	December 2014
Tin-Vacancy Quantum Emitters in Diamond Iwasaki, Takayuki; Miyamoto, Yoshiyuki; Taniguchi, Takashi Physical Review Letters, Vol. 119, Issue 25 https://doi.org/10.1103/PhysRevLett.119.253601	journal	December 2017
Ultralong spin coherence time in isotopically engineered diamond Balasubramanian, Gopalakrishnan; Neumann, Philipp; Twitchen, Daniel Nature Materials, Vol. 8, Issue 5 https://doi.org/10.1038/nmat2420	journal	April 2009
Material platforms for spin-based photonic quantum technologies Atatüre, Mete; Englund, Dirk; Vamivakas, Nick Nature Reviews Materials, Vol. 3, Issue 5 https://doi.org/10.1038/s41578-018-0008-9	journal	April 2018
Scalable Fabrication of High Purity Diamond Nanocrystals with Long-Spin-Coherence Nitrogen Vacancy Centers Trusheim, Matthew E.; Li, Luozhou; Laraoui, Abdelghani Nano Letters, Vol. 14, Issue 1 https://doi.org/10.1021/nl402799u	journal	November 2013
Deterministic delivery of remote entanglement on a quantum network Humphreys, Peter C.; Kalb, Norbert; Morits, Jaco P. J. Nature, Vol. 558, Issue 7709 https://doi.org/10.1038/s41586-018-0200-5	journal	June 2018
Single Nitrogen Vacancy Centers in Chemical Vapor Deposited Diamond Nanocrystals Rabeau, J. R.; Stacey, A.; Rabeau, A. Nano Letters, Vol. 7, Issue 11 https://doi.org/10.1021/nl0719271	journal	November 2007
Large-scale self-assembly of dispersed nanodiamonds Huang, Houjin; Dai, Liming; Wang, David H. Journal of Materials Chemistry, Vol. 18, Issue 12 https://doi.org/10.1039/b716676a	journal	January 2008
Electron–phonon processes of the silicon-vacancy centre in diamond Jahnke, Kay D.; Sipahigil, Alp; Binder, Jan M. New Journal of Physics, Vol. 17, Issue 4 https://doi.org/10.1088/1367-2630/17/4/043011	journal	April 2015
Bright and photostable single-photon emitter in silicon carbide Lienhard, Benjamin; Schröder, Tim; Mouradian, Sara Optica, Vol. 3, Issue 7 https://doi.org/10.1364/OPTICA.3.000768	journal	January 2016
Multi-dimensional single-spin nano-optomechanics with a levitated nanodiamond Neukirch, Levi P.; von Haartman, Eva; Rosenholm, Jessica M. Nature Photonics, Vol. 9, Issue 10 https://doi.org/10.1038/nphoton.2015.162	journal	September 2015
Quantum nanophotonics in diamond [Invited] Schröder, Tim; Mouradian, Sara L.; Zheng, Jiabao Journal of the Optical Society of America B, Vol. 33, Issue 4 https://doi.org/10.1364/JOSAB.33.000B65	journal	January 2016
Nanodiamonds as multi-purpose labels for microscopy Hemelaar, S. R.; de Boer, P.; Chipaux, M. Scientific Reports, Vol. 7, Issue 1 https://doi.org/10.1038/s41598-017-00797-2	journal	April 2017
Fluorescent Nanodiamond–Gold Hybrid Particles for Multimodal Optical and Electron Microscopy Cellular Imaging Liu, Weina; Naydenov, Boris; Chakrabortty, Sabyasachi Nano Letters, Vol. 16, Issue 10 https://doi.org/10.1021/acs.nanolett.6b02456	journal	September 2016
Chemically Enhancing Block Copolymers for Block-Selective Synthesis of Self-Assembled Metal Oxide Nanostructures Kamcev, Jovan; Germack, David S.; Nykypanchuk, Dmytro ACS Nano, Vol. 7, Issue 1 https://doi.org/10.1021/nn304122b	journal	December 2012
Optical and Spin Coherence Properties of Nitrogen-Vacancy Centers Placed in a 100 nm Thick Isotopically Purified Diamond Layer Ishikawa, Toyofumi; Fu, Kai-Mei C.; Santori, Charles Nano Letters, Vol. 12, Issue 4 https://doi.org/10.1021/nl300350r	journal	January 2012
Electrochemistry of Undoped Diamond Nanoparticles: Accessing Surface Redox States Holt, Katherine B.; Caruana, Daren J.; Millán-Barrios, Enrique J. Journal of the American Chemical Society, Vol. 131, Issue 32 https://doi.org/10.1021/ja902216n	journal	August 2009
SiO ₂ Atomic Layer Deposition Using Tris(dimethylamino)silane and Hydrogen Peroxide Studied by in Situ Transmission FTIR Spectroscopy Burton, B. B.; Kang, S. W.; Rhee, S. W. The Journal of Physical Chemistry C, Vol. 113, Issue 19 https://doi.org/10.1021/jp806638e	journal	April 2009
Quantum sensing Degen, C. L.; Reinhard, F.; Cappellaro, P. Reviews of Modern Physics, Vol. 89, Issue 3 https://doi.org/10.1103/RevModPhys.89.035002	journal	July 2017
The biocompatibility of fluorescent nanodiamonds and their mechanism of cellular uptake Vaijayanthimala, Vairakkannu; Tzeng, Yan-Kai; Chang, Huan-Cheng Nanotechnology, Vol. 20, Issue 42 https://doi.org/10.1088/0957-4484/20/42/425103	journal	September 2009
Size-controlled fluorescent nanodiamonds: a facile method of fabrication and color-center counting Mahfouz, Remi; Floyd, Daniel L.; Peng, Wei Nanoscale, Vol. 5, Issue 23 https://doi.org/10.1039/c3nr03320a	journal	January 2013
Superconducting Ferromagnetic Nanodiamond Zhang, Gufei; Samuely, Tomas; Xu, Zheng ACS Nano, Vol. 11, Issue 6 https://doi.org/10.1021/acsnano.7b01688	journal	May 2017
Wide-Field Multispectral Super-Resolution Imaging Using Spin-Dependent Fluorescence in Nanodiamonds Chen, Edward H.; Gaathon, Ophir; Trusheim, Matthew E. Nano Letters, Vol. 13, Issue 5 https://doi.org/10.1021/nl400346k	journal	April 2013
Ion implantation in nanodiamonds: size effect and energy dependence Shiryaev, Andrey A.; Hinks, Jonathan A.; Marks, Nigel A. Scientific Reports, Vol. 8, Issue 1 https://doi.org/10.1038/s41598-018-23434-y	journal	March 2018
Nitrogen Control in Nanodiamond Produced by Detonation Shock-Wave-Assisted Synthesis Shenderova, Olga A.; Vlasov, Igor I.; Turner, Stuart The Journal of Physical Chemistry C, Vol. 115, Issue 29 https://doi.org/10.1021/jp202057q	journal	June 2011
Impact of Surface Functionalization on the Quantum Coherence of Nitrogen-Vacancy Centers in Nanodiamonds Ryan, Robert G.; Stacey, Alastair; O’Donnell, Kane M. ACS Applied Materials & Interfaces, Vol. 10, Issue 15 https://doi.org/10.1021/acsami.7b19238	journal	December 2017
High Nitrogen Doping of Detonation Nanodiamonds Pichot, Vincent; Stephan, Odile; Comet, Marc The Journal of Physical Chemistry C, Vol. 114, Issue 22 https://doi.org/10.1021/jp9121485	journal	May 2010
Quantum Nonlinear Optics with a Germanium-Vacancy Color Center in a Nanoscale Diamond Waveguide Bhaskar, M. K.; Sukachev, D. D.; Sipahigil, A. Physical Review Letters, Vol. 118, Issue 22 https://doi.org/10.1103/PhysRevLett.118.223603	journal	May 2017
Two-Dimensional Nanoscale Imaging of Gadolinium Spins via Scanning Probe Relaxometry with a Single Spin in Diamond Pelliccione, M.; Myers, B. A.; Pascal, L. M. A. Physical Review Applied, Vol. 2, Issue 5 https://doi.org/10.1103/PhysRevApplied.2.054014	journal	November 2014
Nanoscopic Patterned Materials with Tunable Dimensions via Atomic Layer Deposition on Block Copolymers Peng, Qing; Tseng, Yu-Chih; Darling, Seth B. Advanced Materials, Vol. 22, Issue 45, p. 5129-5133 https://doi.org/10.1002/adma.201002465	journal	September 2010

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