Ion Write Microthermotics: Programing Thermal Metamaterials at the Microscale

Choe, Hwan Sung; Prabhakar, Radhika; Wehmeyer, Geoff; Allen, Frances I.; Lee, Woochul; Jin, Lei; Li, Ying; Yang, Peidong; Qiu, Cheng-Wei; Dames, Chris; Scott, Mary; Minor, Andrew; Bahk, Je-Hyeong; Wu, Junqiao

doi:10.1021/acs.nanolett.9b00984

Title: Ion Write Microthermotics: Programing Thermal Metamaterials at the Microscale

Journal Article · Mon May 06 00:00:00 EDT 2019 · Nano Letters

DOI:https://doi.org/10.1021/acs.nanolett.9b00984· OSTI ID:1601201

Choe, Hwan Sung ^[1]; Prabhakar, Radhika ^[2]; Wehmeyer, Geoff ^[3]; Allen, Frances I. ^[3];

^[4]; Jin, Lei ^[1]; Li, Ying ^[5];

^[4]; Qiu, Cheng-Wei ^[5]; Dames, Chris ^[1];

^[1]; Minor, Andrew ^[1];

^[2];

^[1]

Univ. of California, Berkeley, CA (United States); Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Univ. of Cincinnati, OH (United States)
Univ. of California, Berkeley, CA (United States)
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States); Univ. of California, Berkeley, CA (United States)
National Univ. of Singapore (Singapore)

Considerable advances in manipulating heat flow in solids have been made through the innovation of artificial thermal structures such as thermal diodes, camouflages, and cloaks. Such thermal devices can be readily constructed only at the macroscale by mechanically assembling different materials with distinct values of thermal conductivity. Here in this paper, we extend these concepts to the microscale by demonstrating a monolithic material structure on which nearly arbitrary microscale thermal metamaterial patterns can be written and programmed. It is based on a single, suspended silicon membrane whose thermal conductivity is locally, continuously, and reversibly engineered over a wide range (between 2 and 65 W/m·K) and with fine spatial resolution (10-100 nm) by focused ion irradiation. Our thermal cloak demonstration shows how ion-write microthermotics can be used as a lithography-free platform to create thermal metamaterials that control heat flow at the microscale.

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Research Organization:: Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES); Tsinghua- Berkeley Shenzhen Institute (TBSI); Ministry of Education (Singapore)

Grant/Contract Number:: AC02-05CH11231; DGE-1752814

OSTI ID:: 1601201

Journal Information:: Nano Letters, Vol. 19, Issue 6; ISSN 1530-6984

Publisher:: American Chemical SocietyCopyright Statement

Country of Publication:: United States

Language:: English

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