Frequency shifted, vacuum pressure sensor
Patent
·
OSTI ID:1568452
Described herein is an apparatus that includes a varactor and an inductor to form a resonant circuit that oscillates at a resonant frequency. The resonant frequency is a function of a pressure of a gas within an aperture of the varactor. In some embodiment, the varactor includes a first layer of p-type material, a first layer of n-type material, and a first np junction formed between the layer of p-type material and the layer of n-type material. The aperture extends at least partially through the layer of p-type material, at least partially through the layer of n-type material, and entirely through the np junction.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- Assignee:
- National Technology & Engineering Solutions of Sandia, LLC (Albuquerque, NM)
- Patent Number(s):
- 10,317,300
- Application Number:
- 15/281,909
- OSTI ID:
- 1568452
- Resource Relation:
- Patent File Date: 09/30/2016
- Country of Publication:
- United States
- Language:
- English
Varactor with integrated micro-discharge source
|
patent | October 2016 |
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