Aberration corrected STEM by means of diffraction gratings
- Corrected Electron Optical Systems GmbH, Heidelberg (Germany)
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). National Center for Electron Microscopy. Molecular Foundry
- Univ. of Oregon, Eugene, OR (United States). Dept. of Physics
In the past 15 years, the advent of aberration correction technology in electron microscopy has enabled materials analysis on the atomic scale. This is made possible by precise arrangements of multipole electrodes and magnetic solenoids to compensate the aberrations inherent to any focusing element of an electron microscope. In this paper, we describe an alternative method to correct for the spherical aberration of the objective lens in scanning transmission electron microscopy (STEM) using a passive, nanofabricated diffractive optical element. This holographic device is installed in the probe forming aperture of a conventional electron microscope and can be designed to remove arbitrarily complex aberrations from the electron's wave front. In this work, we show a proof-of-principle experiment that demonstrates successful correction of the spherical aberration in STEM by means of such a grating corrector (GCOR). Our GCOR enables us to record aberration-corrected high-resolution high-angle annular dark field (HAADF-) STEM images, although yet without advancement in probe current and resolution. Finally, improvements in this technology could provide an economical solution for aberration-corrected high-resolution STEM in certain use scenarios.
- Research Organization:
- Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
- Sponsoring Organization:
- USDOE Office of Science (SC), Basic Energy Sciences (BES)
- Grant/Contract Number:
- AC02-05CH11231; SC0010466; AC02—05CH11231
- OSTI ID:
- 1435092
- Alternate ID(s):
- OSTI ID: 1550358
- Journal Information:
- Ultramicroscopy, Vol. 182; ISSN 0304-3991
- Publisher:
- ElsevierCopyright Statement
- Country of Publication:
- United States
- Language:
- English
Web of Science
Nanostructuring of electron beams
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journal | January 2019 |
A tunable path-separated electron interferometer with an amplitude-dividing grating beamsplitter
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journal | December 2018 |
Electron round lenses with negative spherical aberration by a tightly focused cylindrically polarized light beam | text | January 2021 |
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