Binary pseudo-random patterned structures for modulation transfer function calibration and resolution characterization of a full-field transmission soft x-ray microscope

Yashchuk, V. V.; Fischer, P. J.; Chan, E. R.; Conley, R.; McKinney, W. R.; Artemiev, N. A.; Bouet, N.; Cabrini, S.; Calafiore, G.; Lacey, I.; Peroz, C.; Babin, S.

doi:10.1063/1.4936752

Title: Binary pseudo-random patterned structures for modulation transfer function calibration and resolution characterization of a full-field transmission soft x-ray microscope

Journal Article · Wed Dec 09 00:00:00 EST 2015 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.4936752· OSTI ID:1410324

Yashchuk, V. V. ^[1]; Fischer, P. J. ^[2]; Chan, E. R. ^[1]; Conley, R. ^[3];

^[4];

^[5]; Bouet, N. ^[6]; Cabrini, S. ^[1]; Calafiore, G. ^[7]; Lacey, I. ^[1]; Peroz, C. ^[7]; Babin, S. ^[7]

Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States); Univ. of California, Santa Cruz, CA (United States)
Argonne National Lab. (ANL), Argonne, IL (United States); Brookhaven National Lab. (BNL), Upton, NY (United States)
Diablo Valley College, Pleasant Hill, CA (United States); Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
KLA-Tencor Corp., Milpitas, CA (United States); Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Brookhaven National Lab. (BNL), Upton, NY (United States). Biological, Environmental & Climate Sciences Dept.
aBeam Technologies, Inc., Hayward, CA (United States)

We present a modulation transfer function (MTF) calibration method based on binary pseudo-random (BPR) one-dimensional sequences and two-dimensional arrays as an effective method for spectral characterization in the spatial frequency domain of a broad variety of metrology instrumentation, including interferometric microscopes, scatterometers, phase shifting Fizeau interferometers, scanning and transmission electron microscopes, and at this time, x-ray microscopes. The inherent power spectral density of BPR gratings and arrays, which has a deterministic white-noise-like character, allows a direct determination of the MTF with a uniform sensitivity over the entire spatial frequency range and field of view of an instrument. We demonstrate the MTF calibration and resolution characterization over the full field of a transmission soft x-ray microscope using a BPR multilayer (ML) test sample with 2.8 nm fundamental layer thickness. We show that beyond providing a direct measurement of the microscope's MTF, tests with the BPRML sample can be used to fine tune the instrument's focal distance. Finally, our results confirm the universality of the method that makes it applicable to a large variety of metrology instrumentation with spatial wavelength bandwidths from a few nanometers to hundreds of millimeters.

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Research Organization:: Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: AC02-05CH11231

OSTI ID:: 1410324

Journal Information:: Review of Scientific Instruments, Vol. 86, Issue 12; ISSN 0034-6748

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 8 works

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References (38)

Correlation type time-of-flight spectrometer with magnetically pulsed polarized neutrons Gordon, J.; Kroó, N.; Orbán, G. Physics Letters A, Vol. 26, Issue 3 https://doi.org/10.1016/0375-9601(68)90510-0	journal	January 1968
Modulation transfer function measurement technique for small-pixel detectors Marchywka, Mike; Socker, Dennis G. Applied Optics, Vol. 31, Issue 34 https://doi.org/10.1364/AO.31.007198	journal	January 1992
A Cross Correlation Chopper for Molecular Beam Modulation Hirschy, V. L.; Aldridge, J. P. Review of Scientific Instruments, Vol. 42, Issue 3 https://doi.org/10.1063/1.1685100	journal	March 1971
Characterization of electron microscopes with binary pseudo-random multilayer test samples Yashchuk, Valeriy V.; Conley, Raymond; Anderson, Erik H. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 649, Issue 1 https://doi.org/10.1016/j.nima.2010.11.124	journal	September 2011
Constructions for perfect maps and pseudorandom arrays Etzion, T. IEEE Transactions on Information Theory, Vol. 34, Issue 5 https://doi.org/10.1109/18.21260	journal	September 1988
2.6 Visualizing Sub-cellular Organization Using Soft X-ray Tomography Le Gros, M. A.; Knoechel, C. G.; Uchida, M. Comprehensive Biophysics https://doi.org/10.1016/b978-0-12-374920-8.00212-5	book	May 2012
Coded aperture imaging with uniformly redundant arrays Fenimore, E. E.; Cannon, T. M. Applied Optics, Vol. 17, Issue 3 https://doi.org/10.1364/AO.17.000337	journal	January 1978
Characterization of the resolving power and contrast transfer function of a transmission X-ray microscope with partially coherent illumination Rehbein, Stefan; Guttmann, Peter; Werner, Stephan Optics Express, Vol. 20, Issue 6 https://doi.org/10.1364/OE.20.005830	journal	January 2012
Real space soft x-ray imaging at 10 nm spatial resolution Chao, W.; Fischer, P.; Tyliszczak, T. Optics Express, Vol. 20, Issue 9 https://doi.org/10.1364/OE.20.009777	journal	January 2012
Calibration of the modulation transfer function of surface profilometers with binary pseudorandom test standards: expanding the application range to Fizeau interferometers and electron microscopes Anderson, Erik H. Optical Engineering, Vol. 50, Issue 9 https://doi.org/10.1117/1.3622485	journal	September 2011
Magnetically suspended cross‐correlation chopper in molecular beam‐surface experiments Comsa, G.; David, R.; Schumacher, B. J. Review of Scientific Instruments, Vol. 52, Issue 6 https://doi.org/10.1063/1.1136697	journal	June 1981
Binary pseudo-random gratings and arrays for calibration of the modulation transfer function of surface profilometers: recent developments Barber, Samuel K.; Soldate, Paul; Anderson, Erik H. SPIE Optical Engineering + Applications, SPIE Proceedings https://doi.org/10.1117/12.825389	conference	August 2009
Coded aperture imaging in X- and gamma-ray astronomy Caroli, E.; Stephen, J. B.; Di Cocco, G. Space Science Reviews, Vol. 45, Issue 3-4 https://doi.org/10.1007/BF00171998	journal	September 1987
Binary pseudorandom grating standard for calibration of surface profilometers Yashchuk, Valeriy V. Optical Engineering, Vol. 47, Issue 7 https://doi.org/10.1117/1.2955798	journal	July 2008
A mechanical correlation chopper for thermal neutron spectroscopy Sköld, K. Nuclear Instruments and Methods, Vol. 63, Issue 1 https://doi.org/10.1016/0029-554x(68)90312-1	journal	July 1968
Modulation transfer function of a lens measured with a random target method Levy, Eli; Peles, Doron; Opher-Lipson, Michal Applied Optics, Vol. 38, Issue 4 https://doi.org/10.1364/AO.38.000679	journal	January 1999
IMD—Software for modeling the optical properties of multilayer films Windt, David L. Computers in Physics, Vol. 12, Issue 4 https://doi.org/10.1063/1.168689	journal	January 1998
Generation of pseudorandom sequences for use in cross‐correlation modulation Koleske, D. D.; Sibener, S. J. Review of Scientific Instruments, Vol. 63, Issue 8 https://doi.org/10.1063/1.1143282	journal	August 1992
Statistical analysis of a cross-correlation chopper for time-of-flight measurements Virjo, A. Nuclear Instruments and Methods, Vol. 63, Issue 3 https://doi.org/10.1016/0029-554X(68)90598-3	journal	August 1968
Soft X-ray microscopy of nanomagnetism Fischer, Peter; Kim, Dong-Hyun; Chao, Weilun Materials Today, Vol. 9, Issue 1-2 https://doi.org/10.1016/S1369-7021(05)71335-3	journal	January 2006
Zone-plate X-ray microscopy Schmahl, G.; Rudolph, D.; Niemann, B. Quarterly Reviews of Biophysics, Vol. 13, Issue 3 https://doi.org/10.1017/S0033583500001700	journal	August 1980
Binary pseudo-random gratings and arrays for calibration of modulation transfer functions of surface profilometers Barber, Samuel K.; Anderson, Erik D.; Cambie, Rossana Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 616, Issue 2-3 https://doi.org/10.1016/j.nima.2009.11.046	journal	May 2010
Stability of modulation transfer function calibration of surface profilometers using binary pseudo-random gratings and arrays with nonideal groove shapes Barber, Samuel K. Optical Engineering, Vol. 49, Issue 5 https://doi.org/10.1117/1.3431659	journal	May 2010
Cross-check of different techniques for two-dimensional power spectral density measurements of x-ray optics Yashchuk, Valeriy V.; Irick, Steve C.; Gullikson, Eric M. Optics & Photonics 2005, SPIE Proceedings https://doi.org/10.1117/12.619892	conference	August 2005
Development of pseudorandom binary arrays for calibration of surface profile metrology tools Barber, Samuel K.; Soldate, Paul; Anderson, Erik H. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 27, Issue 6 https://doi.org/10.1116/1.3245997	journal	January 2009
Spatially resolved height response of phase-shifting interferometers measured using a patterned mirror with varying spatial frequency Wang, Quandou Optical Engineering, Vol. 49, Issue 9 https://doi.org/10.1117/1.3488052	journal	September 2010
The Fourier method in slow neutron time-of-flight spectrometry Virjo, A. Nuclear Instruments and Methods, Vol. 73, Issue 2 https://doi.org/10.1016/0029-554X(69)90205-5	journal	September 1969
Profile coating and its application for Kirkpatrick-Baez mirrors Liu, Chian Optical Engineering, Vol. 42, Issue 12 https://doi.org/10.1117/1.1625381	journal	December 2003
X-Ray Spectromicroscopy—A Tool for Environmental Sciences Thieme, Jürgen; McNult, Ian; Vogt, Stefan Environmental Science & Technology, Vol. 41, Issue 20 https://doi.org/10.1021/es0726254	journal	October 2007
Modulation Transfer Function Measurement Using Three- and Four-bar Targets Boreman, Glenn D.; Yang, Sidney Applied Optics, Vol. 34, Issue 34 https://doi.org/10.1364/AO.34.008050	journal	January 1995
Wedged multilayer Laue lens Conley, Ray; Liu, Chian; Qian, Jun Review of Scientific Instruments, Vol. 79, Issue 5 https://doi.org/10.1063/1.2924209	journal	May 2008
Probing nanoscale behavior of magnetic materials with soft X-ray spectromicroscopy Fischer, Peter; Fadley, Charles S. Nanotechnology Reviews, Vol. 1, Issue 1 https://doi.org/10.1515/ntrev-2011-0001	journal	January 2012
Slow neutron time-of-flight spectrometry with a pseudo-random input signal Virjo, A. Nuclear Instruments and Methods, Vol. 75, Issue 1 https://doi.org/10.1016/0029-554X(69)90654-5	journal	November 1969
Measurement of the modulation transfer function of an X-ray microscope based on multiple Fourier orders analysis of a Siemens star Otón, Joaquín; Sorzano, Carlos Oscar S.; Marabini, Roberto Optics Express, Vol. 23, Issue 8 https://doi.org/10.1364/OE.23.009567	journal	January 2015
Reactivity measurement using pseudo-random source excitation Stern, T. E.; Blaquiere, A.; Valat, J. Journal of Nuclear Energy. Parts A/B. Reactor Science and Technology, Vol. 16, Issue 11-12 https://doi.org/10.1016/0368-3230(62)90166-0	journal	November 1962
Multilayer growth in the APS rotary deposition system Conley, Ray; Liu, Chian; Kewish, Cameron M. Optical Engineering + Applications, SPIE Proceedings https://doi.org/10.1117/12.736024	conference	September 2007
Introduction to Focused Ion Beams Giannuzzi, Lucille A.; Stevie, Fred A. Springer New York, NY https://doi.org/10.1007/b101190	book	January 2005
Impulse-response and reverberation-decay measurements made by using a periodic pseudorandom sequence Chu, W. T. Applied Acoustics, Vol. 29, Issue 3 https://doi.org/10.1016/0003-682X(90)90018-P	journal	January 1990

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Development of a high performance surface slope measuring system for two-dimensional mapping of x-ray optics Lacey, Ian; Adam, Jérôme; Centers, Gary P. Advances in Metrology for X-Ray and EUV Optics VII https://doi.org/10.1117/12.2273029	conference	September 2017

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