Thermal transport in suspended silicon membranes measured by laser-induced transient gratings

Vega-Flick, A.; Duncan, R. A.; Eliason, J. K.; Cuffe, J.; Johnson, J. A.; Peraud, J. -P. M.; Zeng, L.; Lu, Z.; Maznev, A. A.; Wang, E. N.; Alvarado-Gil, J. J.; Sledzinska, M.; Sotomayor Torres, C. M.; Chen, G.; Nelson, K. A.

doi:10.1063/1.4968610

Title: Thermal transport in suspended silicon membranes measured by laser-induced transient gratings

Journal Article · Mon Dec 05 00:00:00 EST 2016 · AIP Advances

DOI:https://doi.org/10.1063/1.4968610· OSTI ID:1334354

^[1]; Duncan, R. A. ^[2]; Eliason, J. K. ^[2]; Cuffe, J. ^[3]; Johnson, J. A. ^[4]; Peraud, J. -P. M. ^[3];

^[3]; Lu, Z. ^[3]; Maznev, A. A. ^[2]; Wang, E. N. ^[3]; Alvarado-Gil, J. J. ^[5]; Sledzinska, M. ^[6];

^[7]; Chen, G. ^[3]; Nelson, K. A. ^[2]

Department of Chemistry, Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, Massachusetts 02139, USA, Applied Physics Department, CINVESTAV-Unidad Mérida, Carretera Antigua a Progreso Km 6, Cordemex, Mérida, Yucatán 97310, Mexico
Department of Chemistry, Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, Massachusetts 02139, USA
Department of Mechanical Engineering, Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, Massachusetts 02139, USA
Department of Chemistry, Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, Massachusetts 02139, USA, Department of Chemistry and Biochemistry, Brigham Young University, Provo, Utah 84602, USA
Applied Physics Department, CINVESTAV-Unidad Mérida, Carretera Antigua a Progreso Km 6, Cordemex, Mérida, Yucatán 97310, Mexico
Catalan Institute of Nanoscience and Nanotechnology (ICN2), CSIC and The Barcelona Institute of Science and Technology, Campus UAB, Bellaterra, 08193 Barcelona, Spain
Catalan Institute of Nanoscience and Nanotechnology (ICN2), CSIC and The Barcelona Institute of Science and Technology, Campus UAB, Bellaterra, 08193 Barcelona, Spain, ICREA, Pg. Lluís Companys 23, 08010 Barcelona, Spain

Studying thermal transport at the nanoscale poses formidable experimental challenges due both to the physics of the measurement process and to the issues of accuracy and reproducibility. The laser-induced transient thermal grating (TTG) technique permits non-contact measurements on nanostructured samples without a need for metal heaters or any other extraneous structures, offering the advantage of inherently high absolute accuracy. We present a review of recent studies of thermal transport in nanoscale silicon membranes using the TTG technique. An overview of the methodology, including an analysis of measurements errors, is followed by a discussion of new findings obtained from measurements on both “solid” and nanopatterned membranes. The most important results have been a direct observation of non-diffusive phonon-mediated transport at room temperature and measurements of thickness-dependent thermal conductivity of suspended membranes across a wide thickness range, showing good agreement with first-principles-based theory assuming diffuse scattering at the boundaries. Measurements on a membrane with a periodic pattern of nanosized holes (135nm) indicated fully diffusive transport and yielded thermal diffusivity values in agreement with Monte Carlo simulations. Based on the results obtained to-date, we conclude that room-temperature thermal transport in membrane-based silicon nanostructures is now reasonably well understood.

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Research Organization:: Energy Frontier Research Centers (EFRC) (United States). Solid-State Solar-Thermal Energy Conversion Center (S3TEC)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: FIS2015-70862-P; 251882; SEV-2013-0295; SC0001299; FG02-09ER46577

OSTI ID:: 1334354

Alternate ID(s):: OSTI ID: 1388425; OSTI ID: 1421042

Journal Information:: AIP Advances, Journal Name: AIP Advances Vol. 6 Journal Issue: 12; ISSN 2158-3226

Publisher:: American Institute of PhysicsCopyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 34 works

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37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
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Title: Thermal transport in suspended silicon membranes measured by laser-induced transient gratings

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