Low pressure and low temperature hermetic wafer bonding using microwave heating
- Budraa, N. K.; Jackson, H. W.; Barmatz, M.
-
Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291)
https://doi.org/10.1109/MEMSYS.1999.746877
|
conference
|
January 1999 |
Gas Dynamic Principles of Cold Spray
|
journal
|
June 1998 |
Improvement in window-glass
|
patent
|
August 1865 |
Incandescent Lamp
|
patent
|
April 1911 |
Process for Manufacturing Glass Vacuum-Wall Bottles
|
patent
|
September 1911 |
Method of Forming Glass Vacuum-Receptacles
|
patent
|
February 1915 |
Process of Manufacturing Vacuum Wall-Containers
|
patent
|
August 1921 |
Machine for the Manufacture of Vacuum-Wall Containers
|
patent
|
November 1922 |
Electron Discharge Device
|
patent
|
November 1925 |
Window Structure
|
patent
|
August 1935 |
Double-Walled Vacuum Receptacle
|
patent
|
October 1936 |
Glass-to-Metal Seal
|
patent
|
October 1936 |
Vacuum Jacketed Glass Tube and Shape
|
patent
|
May 1938 |
Double Glazing Unit
|
patent
|
July 1938 |
Double Glazed Window
|
patent
|
October 1939 |
Annular Fusion Joint
|
patent
|
May 1940 |
High Voltage Vacuum Tube
|
patent
|
July 1940 |
Method of Making Composite Glass-Metal Articles
|
patent
|
October 1940 |
Glass and Metal Construction Unit
|
patent
|
November 1940 |
Glass-to-Metal Seal
|
patent
|
March 1942 |
Process for Kovar-Glass Seals
|
patent
|
April 1942 |
Unitary Stem and Contact Base for Electron Tubes and the Like
|
patent
|
May 1942 |
Double Window
|
patent
|
January 1943 |
Metal Insert for Vacuum-Tight Sealing
|
patent
|
February 1945 |
Method of Manufacturing Bodies Consisting of a Core of Chrome-Iron or a Similar Chromium Alloy and of a Thin Layer Adapted to Form a Metal to Glass Seal
|
patent
|
August 1949 |
Preoxidation of Stainless Steel
|
patent
|
April 1950 |
Method of Sealing a Glass Facing to a Surface of a Metal Body
|
patent
|
February 1952 |
Multiple Sheet Glazing Unit
|
patent
|
January 1953 |
Method of Making Glass-to-Metal Seals
|
patent
|
March 1954 |
Multiple Glazed Unit
|
patent
|
May 1955 |
Apparatus for Automatically Vacuum Coating of Interior of Glass Tubes with Metal
|
patent
|
January 1956 |
Seal for Composite Cathode Ray Tubes
|
patent
|
July 1956 |
Multiple-Pane Glazing Unit and Manufacture Thereof
|
patent
|
July 1956 |
Preoxidation of Stainless Steel for Glass-to-Metal Sealing
|
patent
|
April 1960 |
Apparatus for Producing a Multiple Sheet Glazing Unit
|
patent
|
January 1961 |
Sealing Access Openings in Glazing Units
|
patent
|
April 1962 |
Insulating Container and Method of Making Same
|
patent
|
February 1966 |
Preoxidation of Stainless Steel for Glass-to-Metal Sealing
|
patent
|
October 1967 |
Glass Unit and Method
|
patent
|
June 1968 |
Multiple Sheet Glazing Unit
|
patent
|
July 1968 |
Method for Oxidizing Alloys
|
patent
|
July 1970 |
Surface Preparation of Iron-Chromium Alloy Parts for Metal-to-Glass Seals
|
patent
|
September 1970 |
Gas Panel Apparatus and Method
|
patent
|
October 1971 |
Sintered Tungsten Carbide-Based Alloys
|
patent
|
October 1972 |
Chromium-Iron Alloy
|
patent
|
June 1973 |
Sealing Technique for Gas Panel
|
patent
|
December 1973 |
Bending of Flat Glass on a Mold with Vacuum
|
patent
|
December 1973 |
Surface Fluorinated Hydrogen Containing Material and Process for Making
|
patent
|
April 1974 |
Heat Insulating Container Having Plastic Walls Retaining Vacuum
|
patent
|
August 1974 |
Method of sealing a metal article to a glass or ceramic article in a vacuum-tight manner
|
patent
|
February 1975 |
Heat-reflecting glass sheets
|
patent
|
August 1975 |
Method of producing a stack of plates
|
patent
|
September 1975 |
Dielectrically isolated integral silicon diaphram or other semiconductor product
|
patent
|
November 1975 |
Double-pane window containing dry atmosphere and method for producing same
|
patent
|
March 1976 |
Add-on multiple glazing with hygroscopic material
|
patent
|
July 1976 |
Device for testing any leakage of vacuum-tight glass seals
|
patent
|
September 1976 |
Evacuated dual glazing system
|
patent
|
November 1976 |
Methods of fabricating low pressure silicon transducers
|
patent
|
April 1977 |
Structural panel
|
patent
|
July 1977 |
Light transmitting panel
|
patent
|
September 1977 |
Deposition of transparent amorphous carbon films
|
patent
|
November 1977 |
FET and bipolar device and circuit process with maximum junction control
|
patent
|
December 1977 |
Method of converting single pane glass to multiple pane, hermetically sealed insulating glass without removing the existing glass sash and frame
|
patent
|
May 1978 |
Stacked lattice spacer support for luminescent display panels
|
patent
|
July 1978 |
Process of constructing a ceramic catalyst support
|
patent
|
December 1978 |
Vacuum panel
|
patent
|
January 1979 |
Glass or ceramic-to-metal composites or seals involving iron base alloys
|
patent
|
April 1979 |
Solar energy collector
|
patent
|
February 1980 |
Insulating window structure and method of forming the same
|
patent
|
May 1980 |
Method for manufacturing variable capacitance pressure transducers
|
patent
|
April 1981 |
Vacuum deposition system and method
|
patent
|
June 1981 |
Hollow microspheres
|
patent
|
December 1981 |
Coupler comprising a light source and lens
|
patent
|
October 1982 |
Window overlay for thermal insulation
|
patent
|
November 1982 |
Stainless steel thermos bottle
|
patent
|
January 1984 |
Vacuum thermal insulation panel
|
patent
|
April 1984 |
Insulating cell element and structures composed thereof
|
patent
|
August 1984 |
Vacuum heat insulator
|
patent
|
December 1984 |
Means for controlling heat flux
|
patent
|
July 1985 |
Flexible selective energy control sheet and assembly using the same
|
patent
|
August 1985 |
Method of bonding silver to glass and mirrors produced according to this method
|
patent
|
October 1985 |
Cryogenic glass-to-metal seal
|
patent
|
March 1987 |
Laser sealed vacuum insulation window
|
patent
|
July 1987 |
Transparent glazing panels
|
patent
|
August 1987 |
Production of glass or glass-ceramic to metal seals with the application of pressure
|
patent
|
November 1987 |
Arsenic-free lead silicate vacuum tube glass
|
patent
|
April 1988 |
Method for producing gas-containing insulating glass assemblies
|
patent
|
October 1988 |
Process for the production of laminated glass plates
|
patent
|
January 1989 |
Thermally insulating window and method of forming
|
patent
|
May 1990 |
Heat-insulating building and/or light element
|
patent
|
April 1991 |
Heat-insulating building and/or light element
|
patent
|
April 1991 |
Window assembly
|
patent
|
May 1991 |
Method for fabricating insulating glass assemblies
|
patent
|
May 1991 |
Thermal insulations using vacuum panels
|
patent
|
July 1991 |
Flat panel display device
|
patent
|
January 1992 |
Neat reflecting glass with multilayer coating
|
patent
|
February 1992 |
Vacuum processing apparatus and transportation system thereof
|
patent
|
February 1992 |
Compact vacuum insulation embodiments
|
patent
|
April 1992 |
Hermetically sealed chip carrier with ultra violet transparent cover
|
patent
|
May 1992 |
Transparent thermal panel
|
patent
|
May 1992 |
Static control overlayers on opto-electronic devices
|
patent
|
June 1992 |
Vacuum insulating unit
|
patent
|
June 1992 |
Compact vacuum insulation
|
patent
|
October 1992 |
Compact vacuum insulation
|
patent
|
January 1993 |
Process for coating of a surface made of glass
|
patent
|
July 1993 |
Insulating glass unit
|
patent
|
December 1993 |
Gas-dynamic spraying method for applying a coating
|
patent
|
April 1994 |
High R super insulation panel
|
patent
|
July 1994 |
Laminated ornamental glass article
|
patent
|
December 1994 |
Carbon film coated glass
|
patent
|
January 1995 |
Method for manufacturing a hybrid circuit charge-coupled device image sensor
|
patent
|
June 1995 |
Radiation-controlled dynamic vacuum insulation
|
patent
|
July 1995 |
Insulation strip and method for single and multiple atmosphere insulating assemblies
|
patent
|
August 1995 |
Welding/sealing glass-enclosed space in a vacuum
|
patent
|
February 1996 |
Insulation strip and method for single and multiple atmosphere insulating assemblies
|
patent
|
February 1996 |
Abrasion wear resistant coated substrate product
|
patent
|
April 1996 |
Electrically activated thermochromic optical shutters
|
patent
|
June 1996 |
Single substrate vacuum processing apparatus having improved exhaust system
|
patent
|
December 1996 |
Variable-angle optical device with optically transparent substance
|
patent
|
December 1996 |
Covers for micromechanical sensors and other semiconductor devices
|
patent
|
March 1997 |
Semiconductor device in a resin package housed in a frame having high thermal conductivity
|
patent
|
April 1997 |
Insulating glazing
|
patent
|
July 1997 |
Thermally insulating glass panel and method of construction
|
patent
|
August 1997 |
Optical semiconductor module and method for manufacturing the same
|
patent
|
February 1998 |
Impact resistant window
|
patent
|
July 1998 |
Flat display panel having spacers
|
patent
|
August 1998 |
Spacer units, image display panels and methods for making and using the same
|
patent
|
September 1998 |
Composite optical and electro-optical devices
|
patent
|
December 1998 |
Process for producing a vacuum in an insulating glazing
|
patent
|
January 1999 |
Micro-electronic assembly including a flip-chip mounted micro-device and method
|
patent
|
January 1999 |
Design improvements to vacuum glazing
|
patent
|
April 1999 |
Seal for vacuum devices and methods for making same
|
patent
|
April 1999 |
Methods of construction of evacuated glazing
|
patent
|
May 1999 |
Component mounting device for an electrical controller
|
patent
|
July 1999 |
Method of making an impact resistant window
|
patent
|
August 1999 |
Air-tightly sealed container for photosemiconductor, and photosemiconductor module
|
patent
|
August 1999 |
Mounting having an aperture cover with adhesive locking feature for flip chip optical integrated circuit device
|
patent
|
September 1999 |
Pass-by insulating glass window unit and method for replacing single glazing
|
patent
|
September 1999 |
Piezoelectric device and method of manufacturing the same
|
patent
|
November 1999 |
Insulating glass units containing intermediate plastic film and method of manufacture
|
patent
|
November 1999 |
Vacuum packaging apparatus for a field emission display and a method thereof using a glass-to-glass bonding
|
patent
|
December 1999 |
Optical component package with a hermetic seal
|
patent
|
February 2000 |
Wall or door of an environmental chamber
|
patent
|
April 2000 |
Method of construction of evacuated glazing
|
patent
|
April 2000 |
Vacuum glazing
|
patent
|
June 2000 |
Design improvements to vacuum glazing
|
patent
|
July 2000 |
Impact resistant window
|
patent
|
August 2000 |
Image apparatus having recessed envelope for placement of electrode
|
patent
|
September 2000 |
Vacuum fusion bonding of glass plates
|
patent
|
October 2000 |
Kinetic spray coating method and apparatus
|
patent
|
October 2000 |
Clear wall panel system
|
patent
|
November 2000 |
Double-wall insulated container
|
patent
|
January 2001 |
Mass reflowable windowed package
|
patent
|
February 2001 |
Vacuum IG window unit with spacers in seal
|
patent
|
September 2001 |
Vacuum IG unit with transparent spacers
|
patent
|
March 2002 |
Peripheral seal for vacuum IG window unit
|
patent
|
April 2002 |
Vacuum IG unit with micro-sized spacers
|
patent
|
April 2002 |
Vacuum IG window unit with edge mounted pump-out tube
|
patent
|
May 2002 |
Glass panel
|
patent
|
May 2002 |
Vacuum IG window unit with dual peripheral seal
|
patent
|
June 2002 |
Sealing of plate structures
|
patent
|
July 2002 |
Vacuum IG unit with spacer/pillar getter
|
patent
|
July 2002 |
Vacuum IG window unit with fiber spacers
|
patent
|
August 2002 |
Vacuum IG window unit with spacers between first and second edge seals
|
patent
|
September 2002 |
Glass panel and method of forming the same
|
patent
|
October 2002 |
Vacuum IG window unit with edge seal formed via microwave curing, and corresponding method of making the same
|
patent
|
November 2002 |
Glass panel and method of manufacturing thereof and spacers used for glass panel
|
patent
|
November 2002 |
Vacuum IG unit with colored spacers
|
patent
|
December 2002 |
Vacuum IG window unit with fiber inclusive edge seal
|
patent
|
January 2003 |
Vacuum IG unit with seal for pump-out aperture
|
patent
|
January 2003 |
Device for packaging electronic components
|
patent
|
February 2003 |
Process for the manufacture of components on glass substrates that have to be sealed, such as flat display screens of the plasma-panel type
|
patent
|
March 2003 |
Multilayered microelectronic device package with an integral window
|
patent
|
March 2003 |
Vacuum IG unit with alkali silicate edge seal and/or spacers
|
patent
|
April 2003 |
Vacuum IG window unit with polymer spacers
|
patent
|
April 2003 |
Packaging of electro-microfluidic devices
|
patent
|
April 2003 |
Vacuum IG window unit with edge seal at least partially diffused at temper and completed via microwave curing, and corresponding method of making the same
|
patent
|
May 2003 |
Limited volume insert bonding process in a vial
|
patent
|
June 2003 |
Hermetically sealed micro-device package with window
|
patent
|
September 2003 |
Vacuum IG window unit with edge seal formed via microwave curing, and corresponding method of making the same
|
patent
|
October 2003 |
Method of manufacturing heat insulating structural and/or light elements and installation for carrying out the method
|
patent
|
October 2003 |
Hermetic seals for large optical packages and the like
|
patent
|
October 2003 |
Vacuum IG window unit with peripheral seal at least partially diffused at temper
|
patent
|
November 2003 |
Chip on board package for optical mice and lens cover for the same
|
patent
|
November 2003 |
Flip-chip assembly of protected micromechanical devices
|
patent
|
December 2003 |
Holding rail for holding glass profile elements
|
patent
|
December 2003 |
VIG evacuation with plasma excitation
|
patent
|
February 2004 |
Fabrication method of semiconductor integrated circuit device and its testing apparatus
|
patent
|
February 2004 |
Vacuum IG window unit with edge seal at least partially diffused at temper and completed via microwave curing, and corresponding method of making the same
|
patent
|
March 2004 |
Hermetically sealed micro-device package using cold-gas dynamic spray material deposition
|
patent
|
April 2004 |
High flow carafe
|
patent
|
May 2004 |
Hermetically sealed micro-device package with window
|
patent
|
July 2004 |
Window assembly for opening closures
|
patent
|
July 2004 |
Thermally controlled window tinting
|
patent
|
September 2004 |
Method of manufacturing glass panel and glasspanel manufactured by the method
|
patent
|
September 2004 |
Device for surface treatment and/or coating and/or producing construction elements, in particular, flat construction elements of glass, glass alloys or metals, by a continuous process
|
patent
|
March 2005 |
Methods of forming backside connections on a wafer stack
|
patent
|
May 2005 |
Hermetically sealed micro-device package using cold-gas dynamic spray material deposition
|
patent
|
August 2005 |
Window sash frame with hinged components
|
patent
|
August 2005 |
Vacuum IG pillar with lubricating and/or reflective coating
|
patent
|
September 2005 |
Light-transmitting glass panel
|
patent
|
October 2005 |
Wafer-level hermetic micro-device packages
|
patent
|
November 2005 |
Method of producing support pillars
|
patent
|
November 2005 |
Method for fabricating an integrated multipane window sash
|
patent
|
December 2005 |
Plastic sheets for use in protecting openings in walled structures
|
patent
|
December 2005 |
Double glazing
|
patent
|
May 2006 |
Glass panel
|
patent
|
July 2006 |
Window sash, glazing insert, and method for manufacturing windows therefrom
|
patent
|
September 2006 |
Glass panel
|
patent
|
October 2006 |
Glass panel
|
patent
|
November 2006 |
Hermetically sealed micro-device package with window
|
patent
|
July 2007 |
Electric lamp
|
patent
|
May 2008 |
Wafer-level hermetic micro-device packages
|
patent
|
April 2009 |
Insulated glazing units
|
patent
|
November 2010 |
Solid-state image pickup apparatus and fabricating method thereof
|
patent-application
|
September 2001 |
Reduced ultraviolet radiation transmitting, variable transmission, glazing assembly
|
patent-application
|
April 2002 |
Double glazing
|
patent-application
|
April 2002 |
Wafer level hermetic sealing method
|
patent-application
|
August 2002 |
Bullet resistant glass panel
|
patent-application
|
June 2004 |
Laminated strength-reinforced window assemblies
|
patent-application
|
September 2004 |
Hermetic window assemblies and frames
|
patent-application
|
September 2004 |
Vacuum glass panel manufacturing method and vacuum glass panel manufactured by the manufacturing method
|
patent-application
|
October 2005 |
Bonded assemblies
|
patent-application
|
November 2005 |
Wafer-level hermetic micro-device packages
|
patent-application
|
December 2005 |
Insulated Glazing Units and Methods
|
patent-application
|
August 2006 |
Spacer Profile for Insulated Glazing Unit
|
patent-application
|
January 2009 |
Hermetically Sealed Package with window
|
patent-application
|
February 2009 |
Windows, Doors and Glazing Assemblies Therefor
|
patent-application
|
October 2009 |
Use of Polysulphide- Containing Two- Component Adhesives for the Production of Windows
|
patent-application
|
December 2009 |
Insulating Glazing Element, Its Manufacture and Use
|
patent-application
|
December 2009 |
Permeation Protection for Pressurized Hydrogen Storage Tank
|
patent-application
|
March 2010 |
Glass-to-Metal Bond Structure
|
patent-application
|
May 2010 |