wafer level packaging of aluminum nitride rf mems filters.

Conference · Sun Feb 01 00:00:00 EST 2015

OSTI ID:1240326

Henry, Michael David; Young, Travis Ryan; Hollowell, Andrew E; Eichenfield, Matt; Olsson, Roy H.

Abstract not provided.

• Research Organization: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
• Sponsoring Organization: USDOE National Nuclear Security Administration (NNSA)
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 1240326
• Report Number(s): SAND2015-1368C; 567217
• Resource Relation: Conference: Proposed for presentation at the IEEE ECTC held May 26-29, 2015 in San Diego, Ca.
• Country of Publication: United States
• Language: English