Highly Laminated Soft Magnetic Electroplated CoNiFe Thick Films
The fabrication and characterization of highly laminated (similar to 40 layers), thick (similar to 40 mu m) films of magnetically soft cobalt-nickel-iron are presented. Thick film fabrication is based on automated sequential electrodeposition of alternating CoNiFe and copper layers, followed by selective copper removal. The film, comprised tens of 1 mu m thick laminations, exhibits saturation flux density of 1.8 T and coercivity of approximately 1.3 Oe. High-frequency film characterization took place in a 36-turn test inductor, which demonstrated constant inductance of 1.6 mu H up to 10 MHz, indicating suppressed eddy-current loss. Quality factor exceeding 40 at 1 MHz, surpassing the performance of similarly fabricated Permalloy (Ni80Fe20) films.
- Sponsoring Organization:
- USDOE Advanced Research Projects Agency - Energy (ARPA-E)
- DOE Contract Number:
- DE-AR0000107
- OSTI ID:
- 1211401
- Journal Information:
- IEEE MAGNETICS LETTERS, Vol. 4; ISSN 1949-307X
- Country of Publication:
- United States
- Language:
- English
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