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Title: Analytic expressions for atomic layer deposition: Coverage, throughput, and materials utilization in cross-flow, particle coating, and spatial atomic layer deposition

Journal Article · · J. Vac. Sci. Technol. A
DOI:https://doi.org/10.1116/1.4867441· OSTI ID:1161332
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Research Organization:
Energy Frontier Research Centers (EFRC) (United States). Institute for Atom-efficient Chemical Transformations (IACT)
Sponsoring Organization:
USDOE Office of Science (SC), Basic Energy Sciences (BES)
DOE Contract Number:
AC02-06CH11357
OSTI ID:
1161332
Journal Information:
J. Vac. Sci. Technol. A, Vol. 32; Related Information: IACT partners with Argonne National Laboratory (lead); Brookhaven National Laboratory; Northwestern University; Purdue University; University of Wisconsin at Madison
Country of Publication:
United States
Language:
English

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