High Speed (Ghz) Ultra-high pressure (GPa) Sensor array fabricated in Integrated CMOS+MEMS process.

Conference · Wed Oct 01 00:00:00 EDT 2008

DOI:https://doi.org/10.1109/MEMSYS.2009.4805515· OSTI ID:1142424

Okandan, Murat; Baker, Michael; Resnick, Paul J.; Hill, Thomas A.; Pearson, Sean; Castaneda, Jaime N.; Trott, Wayne Merle; Jones, David Alexander; Lackey, Chad

Abstract not provided.

• Research Organization: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
• Sponsoring Organization: USDOE National Nuclear Security Administration (NNSA)
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 1142424
• Report Number(s): SAND2008-6986C; 508968
• Resource Relation: Conference: Proposed for presentation at the IEEE MEMS 2009 held January 25-29, 2009 in Sorento, Italy.
• Country of Publication: United States
• Language: English