Integration of piezoelectric aluminum nitride and ultrananocrystalline diamond films for implantable biomedical microelectromechanical devices
- Materials Science Division
- Research Organization:
- Argonne National Lab. (ANL), Argonne, IL (United States)
- Sponsoring Organization:
- SC BASIC ENERGY SCIENCES
- DOE Contract Number:
- DE-AC02-06CH11357
- OSTI ID:
- 1076744
- Report Number(s):
- ANL/NST/JA-75517
- Journal Information:
- Applied Physics Letters, Vol. 201, Issue 10 ; 2013
- Country of Publication:
- United States
- Language:
- ENGLISH
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