Hard X-ray Nano Patterning using a Sectioned Multilayer
Journal Article
·
· Journal of Applied Physics
We report a hard x-ray patterning capable of drawing lines with a width below 100 nm using x-rays at 0.165 nm. A specially prepared mask based on multilayer growth technology was used as an x-ray mask effectively. The x-ray Talbot effect in near field was investigated and utilized in the patterning. Since multilayers with a few nanometer layer spacing are readily available, the proposed hard x-ray nano patterning, free of the limit imposed by the Rayleigh criterion in optical range, can potentially be an ultimate optical lithography technique.
- Research Organization:
- Brookhaven National Lab. (BNL), Upton, NY (United States)
- Sponsoring Organization:
- USDOE SC OFFICE OF SCIENCE (SC)
- DOE Contract Number:
- DE-AC02-98CH10886
- OSTI ID:
- 1041861
- Report Number(s):
- BNL-97539-2012-JA; JAPIAU; TRN: US201212%%273
- Journal Information:
- Journal of Applied Physics, Vol. 109, Issue 4; ISSN 0021-8979
- Country of Publication:
- United States
- Language:
- English
Similar Records
Hard x-ray nano patterning using a sectioned multilayer.
Hard X-ray Nano Patterning Using a Sectioned Multilayer
Multilayers are enabling new science with x-ray free electron lasers
Journal Article
·
Sat Jan 01 00:00:00 EST 2011
· J. Appl. Phys.
·
OSTI ID:1041861
+8 more
Hard X-ray Nano Patterning Using a Sectioned Multilayer
Journal Article
·
Wed Feb 23 00:00:00 EST 2011
· Journal of Applied Physics
·
OSTI ID:1041861
+8 more
Multilayers are enabling new science with x-ray free electron lasers
Journal Article
·
Tue Jul 17 00:00:00 EDT 2007
· SPIE Newsroom, N/A, N/A, September 10, 2007, N/A
·
OSTI ID:1041861