Performance of the Phase 1 superconducting x-ray lithography source (SXLS) at BNL
Conference
·
OSTI ID:10146864
- Brookhaven National Lab., Upton, NY (United States)
- Grumman Aerospace Corp., Bethpage, NY (United States)
The Phase I SXLS electron storage ring has a circumference of 8.5 meters, it uses conventional dipole magnets, B {le} 1.1 T and p = 60 cm, and it is capable of operating in the range of 50--250 MeV. It is the forerunner of the Phase II SXLS ring which will operate at 700 MeV and will make use of superconducting dipoles, B{sub o} = 3.87 Tesla, as a source of {lambda}{sub c} = 10 angstrom x-rays for proximity printing lithography. The Phase I storage ring has been successfully commissioned; stored currents in excess of one ampere have been achieved. A report on the performance of the machine is presented.
- Research Organization:
- Brookhaven National Lab., Upton, NY (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC02-76CH00016
- OSTI ID:
- 10146864
- Report Number(s):
- BNL-47377; CONF-920315-38; ON: DE92014171
- Resource Relation:
- Conference: EPAC 92: 3. European particle accelerator conference: accelerators for special applications,Berlin (Germany),24-28 Mar 1992; Other Information: PBD: [1992]
- Country of Publication:
- United States
- Language:
- English
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