Ion-beam-assisted deposition of wear-resistant coatings. Final report, October 1, 1988--January 31, 1993
Both titanium nitride and chromium oxide coatings have been fabricated by ion-beam-assisted deposition, which involved the electron-beam evaporation of Ti or Cr and simultaneous bombardment with low-energy argon ions. Either nitrogen or oxygen gas was introduced into the deposition system to at 1 to 8 {times} 10{sup {minus}3} Pa to form the compound. Monitoring of the individual fluxes of vapor atoms, ions, and gas molecules incident on steel or Si substrates permitted control of deposition parameters, with the most critical one being ratio of incident argon ions to vapor atoms, R{sub ia}. For both types of films, the hardness increased with this ratio. In scratch and sliding wear tests, both types of films demonstrated excellent adhesion to the substrates. For the TiN films, optimum wear resistance was obtained for R{sub ia} = 0. 3 with a friction coefficient of 0.35 at Hertzian contact pressures in the range of 1 GPa. For the Cr{sub 2}O{sub 3} films, optimum wear resistance was obtained for R{sub ia} = 0.1. At room temperature, no wear was observed for Si{sub 3}N{sub 4} balls sliding on the coatings at contact pressures up to 1 GPa. At temperatures up to 500C, virtually no wear was observed for sapphire balls sliding on the coatings at similar contact pressures.
- Research Organization:
- Naval Research Lab., Washington, DC (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AI02-88CE90024
- OSTI ID:
- 10138628
- Report Number(s):
- DOE/CE/90024-14; ON: DE93011120
- Resource Relation:
- Other Information: PBD: Feb 1993
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
TITANIUM NITRIDES
DEPOSITION
WEAR RESISTANCE
CHROMIUM OXIDES
PROGRESS REPORT
ION BEAMS
PROTECTIVE COATINGS
ADHESION
SILICON NITRIDES
TRANSMISSION ELECTRON MICROSCOPY
MICROSTRUCTURE
TRIBOLOGY
STEELS
FRICTION
HARDNESS
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360203
INDUSTRIAL APPLICATIONS
RADIATION PROCESSING
MECHANICAL PROPERTIES