Scanning Acoustic Microscopy for Characterization of Coatings and Near-Surface Features of Ceramics
- ORNL
Scanning Acoustic Microscopy (SAcM) has been widely used for non-destructive evaluation (NDE) in various fields such as material characterization, electronics, and biomedicine. SAcM uses high-frequency acoustic waves (60 MHz to 2.0 GHz) providing much higher resolution (up to 0.5 {micro}m) compared to conventional ultrasonic NDE, which is typically about 500 {micro}m. SAcM offers the ability to non-destructively image subsurface features and visualize the variations in elastic properties. These attributes make SAcM a valuable tool for characterizing near-surface material properties and detecting fine-scale flaws. This paper presents some recent applications of SAcM in detecting subsurface damage, assessing coatings, and visualizing residual stress for ceramic and semiconductor materials.
- Research Organization:
- Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). High Temperature Materials Lab. (HTML)
- Sponsoring Organization:
- USDOE Office of Energy Efficiency and Renewable Energy (EERE)
- DOE Contract Number:
- AC05-00OR22725
- OSTI ID:
- 1003287
- Resource Relation:
- Journal Volume: 27; Conference: The 30th International Conference & Exposition on Advanced Ceramics & Composites, Cocoa Beach, FL, USA, 20060122, 20060127
- Country of Publication:
- United States
- Language:
- English
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